SEMs are the most versatile and widespread electron microscopes worldwide. However, with decreasing dimensions of devices TEMs are getting more involved in the fabrication and inspection. Additionally, for specific tasks (magnetic imaging in storage industry) dedicated instruments other than electron microscopes are necessary. We aim to develop new procedures for imaging in SEMs, including new beam generation techniques, for adding functionalities to SEMs.

Klíčová slova
SEM;TEM;detector;nanostructures

TN01000008/10

angličtina

Urbánek Michal, Ing., Ph.D. - hlavní řešitel
Kolíbal Miroslav, prof. Ing., Ph.D. - spoluřešitel

Příprava a charakterizace nanostruktur
- odpovědné pracoviště (29.1.2019 - nezadáno)
Příprava a charakterizace nanostruktur
- příjemce (29.1.2019 - nezadáno)

Odpovědnost: Urbánek Michal, Ing., Ph.D.