Publication detail

Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method

OHLÍDAL, M., OHLÍDAL, I., FRANTA, D., KRÁLÍK, T., JÁKL, M., ELIÁŠ, M.

Original Title

Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method

Type

journal article - other

Language

English

Original Abstract

An original method enabling us to characterize the non-uniformity of thin-film thickness is decribed. This method employs the interpretation of data obtained by multiple-wavelength reflectometry. The values of the reflectance are measured for several wavelengths in many points lying along the area of the film. The spectral dependence of the refractive index of the material forming the film is determined using variable-angle spectroscopic ellipsometry.

Key words in English

non-uniform thin films, optical characterization

Authors

OHLÍDAL, M., OHLÍDAL, I., FRANTA, D., KRÁLÍK, T., JÁKL, M., ELIÁŠ, M.

RIV year

2002

Released

1. 8. 2002

ISBN

0142-2421

Periodical

Surface and Interface Analysis

Year of study

34

Number

1

State

United Kingdom of Great Britain and Northern Ireland

Pages from

660

Pages to

663

Pages count

4

BibTex

@article{BUT40936,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Daniel {Franta} and Tomáš {Králík} and Miloš {Jákl} and Marek {Eliáš}",
  title="Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method",
  journal="Surface and Interface Analysis",
  year="2002",
  volume="34",
  number="1",
  pages="4",
  issn="0142-2421"
}