Course detail

Micro and Nanotechnology

FSI-ZMNAcad. year: 2009/2010

Micro- a nanotechniques play an important role in various fields of human activities where micro- and nanomechanisms can help to solve many actual problems e.g. in computer and medical devices. Recent inventions will enable new miniature machines to be applied e.g. in clinical or aesthetic surgery. This course is devoted not only to the basic principles of these machines but also it brings generalized approaches to their design and fabrication.

Language of instruction

Czech

Number of ECTS credits

5

Mode of study

Not applicable.

Guarantor

prof. Ing. Ivan Křupka, Ph.D.

Department

Institute of Machine and Industrial Design (ÚK)

Learning outcomes of the course unit

Students will acquire basic knowledge with respect to the design and production of MEMS and NEMS.

Prerequisites

Students are expected to be familiar with composing engineering drawings of simple mechanisms and have basic knowledge of tribology.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.

Assesment methods and criteria linked to learning outcomes

Theoretical knowledge of the MEMS and NEMS design will be tested.

Course curriculum

Not applicable.

Work placements

Not applicable.

Aims

Students will be acquainted with the design and production of MEMS and NEMS. Practical examples should help to explain current approaches and cooperation between research and industrial applications.

Specification of controlled education, way of implementation and compensation for absences

Attendance at seminars is checked. Absence from lessons may be compensated for according to instructions of the teacher.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

S. E. Lyshevski: Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, CRC Press, 2000
M. Gad-El-Hak: The MEMS handbook,CRC Press, 2001
M. Gad-El-Hak: Modeling MEMS and NENS, CRC Press, 2002

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme M2I-P Master's

    branch M-KSI , 1. year of study, winter semester, compulsory

Type of course unit

 

Lecture

39 hours, optionally

Teacher / Lecturer

prof. Ing. Ivan Křupka, Ph.D.

Syllabus

1. Introduction to MEMS and NEMS. Simple components, mechanisms and machines.
2. Manipulation with micro- and nano-objects I. Light field and optical traps.
3. Manipulation with micro- and nano-objects II. Optical tweezers and scissors.
4. Microlitography
5. Interferometry
6. Visit at Institute of scientific instruments Czech Academy of Sciences
7. LIBS
8. Boundary films
9. Presentations: MEMS Applications
10.Presentations: MEMS Applications
11. Presentations: MEMS Applications
12. Presentations: MEMS Applications
13. Exam