Cílem projektu je prvková a strukturní analýza povrchů pevných látek a studium velmi tenkých vrstev

Description in English
The main goal of the project is to carry out elemental and structural analysis of surfaces and ultrathin films. LEIS is a suitable method for this purpose due to its extreme surface sensitivity. It is superior among other analytical methods in simplicityand speed of measured data processing. Hence it matches requirements for in situ deposition monitoring. Surface sensitivity can be specified to the outermost surface monolayer when an electrostatic energy analyser is applied. Other subsurface layers canbe analysed with a ToF (Time of Flight) analyser. The elemental composition and structure of ultrathin films (in the range from one to ten topmost atomic monolayers) will be studied using LEIS spectrometers with both types of analysers. The fundamental objectives of the proposed project: 1) Examination of peak width and shape in LEIS spectra as a function of the thickness of analysed films. The results will be used for fast in situ monitoring of layer deposition at IFE FME BUT. 2) Defect detection in