Project detail
he project deals with a topical and very important problem, the study of influence of electrostatic and magnetic field on amplification and energy-selective detection of SEs in the high pressure conditions of VP-SEM. The theoretical part of the submitted project is focused to study and simulations of the electron gas interactions, the signal generation, the ion generation and their density as well as a the study of recombination processes with the help of extension of the EOD program based on the Monte Carlo algorithm. The practical part of this project is focused on realization of the unique true secondary and backscattered electron detector, where the secondary electrons are multiplied by the influence of the magnetic field in the high pressure conditions and deflected by the electrostatic field towards detection electrode located around the specimen. The BSEs are detected by the YAG single crystal placed above the specimen.
Duration: 1.1.2010 — 31.12.2013
Funding resources
Grantová agentura České republiky - Standardní projekty
On the project
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Description in English
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Keywords
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Key words in English
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Mark
GAP102/10/1410
Default language
Czech
People responsible
Neděla Vilém, doc. Ing. et Ing., Ph.D., DSc. - principal person responsible
Units
Department of Electrical and Electronic Technology
- responsible department (1.1.1989 - not assigned)
Department of Electrical and Electronic Technology
- co-beneficiary (27.1.2010 - not assigned)
Results
JIRÁK, J.; ČUDEK, P.; NEDĚLA, V. Scintillation Secondary Electron Detector For ESEM And SEM. MICROSCOPY AND MICROANALYSIS, 2012, vol. 2012 (18), no. Suppl 2, p. 1266-1267. ISSN: 1431-9276.
Detail
Responsibility: Neděla Vilém, doc. Ing. et Ing., Ph.D., DSc.