Project detail

Formation and properties of novel self-organized mixed-oxide 3-D nanostructured films for use in advanced microdevices (AnoNanoFilm)

Duration: 01.01.2014 — 31.12.2016

Funding resources

Czech Science Foundation - Standardní projekty

- whole funder (2014-01-01 - 2016-12-31)

On the project

The making of 3-dimensional nanostructured materials has become the most versatile area of research aiming at advanced materials with new fundamental and functional properties. The project seeks a new way to build self-assembled, versatile 3-D nanostructured metal-oxide, metal and metal-oxide-semiconductor films (nanofilms) by merging the benefits of advanced nanocomposite inorganic materials with the flexibility of electrochemistry-based techniques. The diversity of film designs and architectures will be explored through the synthesis of niobium-, tungsten- and aluminium-oxide-containing 3-D nanofilms via electrochemical anodizing and deposition treatments of superimposed Al, Nb and W layers on microelectronic substrates. The film formation-structure-property relationship will be determined to gain insight into undamental electrochemical, physical, optical, electron and ionic transport phenomena in the films in pursuit of tailoring film properties and discover functionalities for potential applications to advanced micro and nanodevices

Description in Czech
Vytváření 3-rozměrných nanostrukturovaných materiálů se stalo nejvšestrannější oblastí výzkumu zaměřeného na pokročilé materiály s novými základními a funkčními vlastnostmi. Projekt hledá nový způsob, jak vytvořit univerzální 3D nanostrukturované kov-oxide-kov a kov- oxid-polovodič vrstvy (nanovrstvy) sloučením výhod pokročilých anorganických nanokompozitních materiálů s flexibilitou elektrochemických technik. Rozmanitost návrhu a architektury vrstev budou zkoumány prostřednictvím syntézy oxidu niobu, wolframu a hliníku obsahující 3D nanovrstvy skrze elektrochemickou anodizaci a depozičních procedur superponovaných Al, Nb a W vrstev na mikroelektronických substrátech. Vztah formování -struktura-vlastnost vrstvy bude stanoven pro získání vhledu do základních elektrochemických, fyzikálních, optických, elektronových a iontových transportních jevů ve vrstvách ve snaze přizpůsobit vlastnosti vrstev a objevovat funkce pro potenciální aplikace v pokročilých mikro a nanosoučástkách.

Keywords
nanotechnology, 3-D nanostructures, self-organized film, electrochemical anodizing, anodic oxide films, porous anodic alumina, aluminium, niobium, tungsten, metal oxides, ionic transport in anodic oxides, electrodeposition, electron transport, formation-structure-property relationship, microdevice

Key words in Czech
nanotechnologie, 3D nanostruktury, samouspořádané vrstvy, elektrochemická anodizace, anodická vrstva oxidu, porezní anodická alumina, hliník, niob, wolfram, oxidy kovů, iontový přenos v anodickém oxidu, elektrodepozice, přenos elektronů, vztah vlastnosti formování-struktura, mikrosoučástka

Mark

GA14-29531S

Default language

English

People responsible

Mozalev Alexander, Dr. - principal person responsible

Units

Central European Institute of Technology BUT
- co-beneficiary (2014-01-01 - 2016-12-31)
Smart Nanodevices
- beneficiary (2013-12-16 - not assigned)

Results

ŠIMŮNKOVÁ, H.; KALINA, L.; BOUŠEK, J.; MOZALEV, A. Formation and electrical properties of tantalum nanotube arrays via electrodeposition from ionic liquid. Book of Abstracts, CEITEC Annual Conference 2014. Didot, spol. s.r.o., Trnkova 119, 628 00 Brno: Masaryk University, Brno, 2014. p. 225-225. ISBN: 978-80-210-7159-9.
Detail

ŠIMŮNKOVÁ, H.; LEDNICKÝ, T.; WHITEHEAD, A.; KALINA, L.; ŠIMŮNEK, P.; HUBÁLEK, J. Tantalum-based nanotube arrays via porous-alumina-assisted electrodeposition from ionic liquid: Formation and electrical characterization. Applied Surface Science, 2021, vol. 548, no. 149264, p. 149264-149274. ISSN: 0169-4332.
Detail

MOZALEV, A.; VAZQUEZ, R.; BITTENCOURT, C.; COSSEMENT, D.; GISPERT-GUIRADO, F.; LLOBET, E.; HABAZAKI, H. Formation structure properties of niobium oxide nanocolumn arrays via self organized anodization of sputter deposited aluminum on niobium layers. JOURNAL OF MATERIALS CHEMISTRY, 2014, vol. 2, no. -, p. 4847-4860. ISSN: 0959-9428.
Detail

VAZQUEZ, R.; MOZALEV, A.; CALAVIA, R.; GISPERT-GUIRADO, F.; VILANOVA, X.; HABAZAKI, H.; LLOBET, E. Gas sensing properties of the nanostructured anodic Zr-W oxide film. Sensors and Actuators B: Chemical, 2014, vol. 204, no. 0, p. 588-595. ISSN: 0925-4005.
Detail

VAZQUEZ, R.; MOZALEV, A.; LLOBET, E. Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers. In SOLID-STATE TRANSDUCERS. EUROPEAN CONFERENCE. 28TH 2014. (EUROSENSORS 2014). Procedia Engineering. Netherlands: Elsevier, 2014. p. 811-814. ISBN: 978-1-5108-0586-6. ISSN: 1877-7058.
Detail

ŠIMŮNKOVÁ, H.; KALINA, L.; BOUŠEK, J.; MOZALEV, A. Electrical properties of tantalum nanotube arrays prepared by electrodeposition from ionic liquid. Nanocon 2014, Conference Proceedings. Ostrava: TANGER Ltd., Ostrava, 2014. p. 106-106. ISBN: 978-80-87294-55-0.
Detail

VAZQUEZ, R.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A. Selective Hydrogen Detection with TiO2 Nanofilm via the Porous-Alumina-Assisted Anodizing of Titanium Layers. In Proceedings of IEEE sensors 2014. IEEE Service Center 445 Hoes Lane Piscataway, NJ 08855-1331 USA: IEEE, 2014. p. 807-810. ISBN: 978-1-4799-0161-6.
Detail

KOLÁŘ, J.; MOZALEV, A.; HUBÁLEK, J. The formation of barrier-type anodic films on aluminium: a tool for estimating the quality of thin metal layers. Book of Abstracts, CEITEC Annual Conference 2014. Didot, spol. s.r.o., Trnkova 119, 628 00 Brno: Masryk University, 2014. p. 151-151.
Detail

MOZALEV, A.; VAZQUEZ, R.; BITTENCOURT, C.; GISPERT-GUIRADO, F.; LLOBET, E.; HABAZAKI, H. Spectroscopic and structural characterization of niobium oxide nanocolumn arrays derived from anodically oxidized Al-Nb metal layers. Proceedings of the 11th Conference on Solid State Chemistry (SSC2014). Trenčianske Teplice, Slovak Republic: 2014. p. 73-74. ISBN: 978-80-971648-0-5.
Detail

MÁRIK, M.; HUBÁLEK, J.; ŠIMŮNKOVÁ, H.; MOZALEV, A. Electrochemical preparation and characterization of tantalum layers. Ceitec PHD Retreat. 1. Brno: MUNI PRESS, 2015. p. 102-102. ISBN: 978-80-210-7825-3.
Detail

LEDNICKÝ, T.; MOZALEV, A. On the anodizing behaviour of aluminium in citric acid Electrolytes. XV. Workshop of Physical Chemists and Electrochemists. 1. Brno: Masaryk University, Brno 2015, 2015. p. 111-114. ISBN: 978-80-210-7857.
Detail

MOZALEV, A.; PYTLÍČEK, Z.; BENDOVÁ, M.; VAZQUEZ, R.; LLOBET, E.; HUBÁLEK, J. 3-D nanostructured tungsten-oxide gas-sensing film via anodizing sputter-deposited Al/W metal layers. In 2015 IEEE SENSORS Proceedings. 2015. p. 170-173. ISBN: 978-1-4799-8202-8.
Detail

MOZALEV, A.; VAZQUEZ, R.; BENDOVÁ, M.; PYTLÍČEK, Z.; LLOBET, E.; HUBÁLEK, J. Porous-alumina-assisted formation of 3-D nanostructured niobium oxide films for advanced sensing applications. Procedia Engineering, 2015, vol. 120, no. 1, p. 435-438. ISSN: 1877-7058.
Detail

MOZALEV, A.; BENDOVÁ, M.; PYTLÍČEK, Z.; HASSEL, A. W. FREE-STANDING WO3 NANOTUBE ARRAY ELECTRODES VIA THE POROUS-ALUMINA-ASSISTED ANODIZING OF W/TI LAYERS. In Proceedings of the 3rd International Conference on ADVANCES IN ELECTRONIC AND PHOTONIC TECHNOLOGIES (ADEPT2015). 2015. p. 15-18. ISBN: 978-80-554-1033-3.
Detail

KOLÁŘ, J.; SVATOŠ, V.; HUBÁLEK, J.; MOZALEV, A. Effect of the aluminium surface morphology on the barrier type anodic film growth. In Proceedings of NANOCON2015 - the 7th International Conference on Nanomaterials - Research & Application. Ostrava: TANGER Ltd., 2015. p. 1-6. ISBN: 978-80-87294-59-8.
Detail

ŠIMŮNKOVÁ, H.; KALINA, L.; BOUŠEK, J.; MOZALEV, A. Tantalum nanotube arrays via porous-alumina-assisted electrodeposition from ionic liquid: Electrical characterization. Hammamet, Tunisia: 2015. p. 19-19.
Detail

ŠIMŮNKOVÁ, H.; KALINA, L.; BOUŠEK, J.; MOZALEV, A. Electrical/dielectric properties of tantalum nanotube arrays via porous-alumina-assisted electrodeposition from ionic liquid. E-MRS Spring Meeting, Lille, France: 2015.
Detail

LEDNICKÝ, T.; MOZALEV, A. Effect of pretreatment parameters on the anodizing behaviour of Al foils in citric acid electrolytes. In CEITEC PhD Retreat, 23-24 April 2015, Valtice, Czech Republic. 1. Brno: Masaryk University, 2015. p. 100-100. ISBN: 978-80-210-7825-3.
Detail

LEDNICKÝ, T.; MOZALEV, A. ON THE GROWTH BEHAVIOR OF NANOPOROUS ANODIC FILMS ON ALUMINIUM IN CITRIC ACID ELECTROLYTES. In Proceedings of the International Conference on Advances in Electronic and Photonic Technologies (ADEPT 2015). 1. Žilina, Slovakia: University of Žilina, 2015. p. 202-205. ISBN: 978-80-554-1033-3.
Detail

LEDNICKÝ, T.; MOZALEV, A. OPTIMIZATION OF SELF-ORGANIZED GROWTH OF NANOPOROUS ANODIC ALUMINA TEMPLATES FOR CAPACITOR APPLICATION. NANOCON 2015 Proceedings of Abstracts. 1st. Ostrava, Czech Republic: TANGER Ltd., 2015. p. 90-90. ISBN: 978-80-87294-59-8.
Detail

LEDNICKÝ, T.; MOZALEV, A. Optimization of Self-organized Growth of Nanoporous Anodic Alumina Templates for Capacitor Application. In Proceedings of NANOCON2015 - the 7th International Conference on Nanomaterials - Research & Application. TANGER spol. s r.o., 2015. p. 1-6. ISBN: 978-80-87294-59-8.
Detail

BENDOVÁ, M.; HASSEL, A.; MOZALEV, A. Photoelectrochemical Water Splitting on Tungsten Oxide Nanorod Arrays via Anodizing Al/W Metal Layers. Proceedings of NANOTECH Tunisia 2015 - International Nanotechnology Conference, 22- 24 April 2015. Hammamet, Tunisia: 2015. p. 48-48.
Detail

BENDOVÁ, M.; HASSEL, A.; MOZALEV, A. Photoelectrochemical Properties of Tungsten Oxide Nanotube Arrays via Porous-Alumina-Assisted Anodizing of Tungsten Layers. Book of Abstracts of the VII Aluminium Surface, Science and Technology, Madeira Island, 17-21 May 2015, Portugal. 2015. p. 64-64.
Detail

MOZALEV, A.; BENDOVÁ, M.; PYTLÍČEK, Z.; HUBÁLEK, J. The formation and properties of porous-anodic-alumina-assisted metal-oxide 3-D nanofilms for use in advanced micro-devices. Book of Abstracts of the VII Aluminium Surface, Science and Technology. 17-21 May 2015, Madeira Island, Portugal: 2015. p. 41-41.
Detail

MOZALEV, A. Anodic Growth and Use of Highly Aligned Refractory Metal Oxide Nanostructures. Proceedings of NANOTECH Tunisia 2015 - International Nanotechnology Conference, 22-24 April 2015. Hammamet, Tunisia: 2015. p. 9-12.
Detail

KNÖRNSCHILD, G.; POZNYAK, A.; KAROZA, A.; MOZALEV, A. Effect of the anodization conditions on the growth and volume expansion of porous alumina films in malonic acid electrolyte. Surface and Coatings Technology, 2015, vol. 275, no. 1, p. 18-25. ISSN: 0257-8972.
Detail

Tantalum nanotube arrays via porous-alumina-assisted electrodeposition from ionic liquid: Electrical characterization. In Tunisia: IOP Publishing Proceeding journals.
Detail

VASILIEV, A.; PISLIAKOV, A.; SOKOLOV, A.; SAMOTAEV, N.; SOLOVIEV, S.; OBLOV, K.; GUARNIERI, V.; LORENZELLI, L.; BRUNELLI, J.; MAGLIONE, A.; LIPILIN, A.; MOZALEV, A.; LEGIN, A. Non-silicon MEMS platforms for gas sensors. Sensors and Actuators B: Chemical, 2016, vol. 224, no. 1, p. 700-713. ISSN: 0925-4005.
Detail

MOZALEV, A.; BENDOVÁ, M.; VAZQUEZ, R.; PYTLÍČEK, Z.; LLOBET, E.; HUBÁLEK, J. Formation and gas-sensing properties of a porous-alumina-assisted 3-D niobium-oxide nanofilm. Sensors and Actuators B: Chemical, 2016, no. 229, p. 587-598. ISSN: 0925-4005.
Detail

MOZALEV, A.; BENDOVÁ, M.; GISPERT-GUIRADO, F.; PYTLÍČEK, Z.; LLOBET, E. Metal-substrate-supported tungsten-oxide nanoarrays via porous-alumina-assisted anodization: from nanocolumns to nanocapsules and nanotubes. Journal of Materials Chemistry A, 2016, vol. 21, no. 4, p. 8219-8232. ISSN: 2050-7488.
Detail

BENDOVÁ, M.; HUBÁLEK, J.; MOZALEV, A. Exploring Electron Transport and Memristive Switching in Nanoscale Au/WOx/W Multijunctions Based on Anodically Oxidized Al/W Metal Layers. Advanced Materials Interfaces, 2016, vol. 3, no. 19, p. 1600512-1600524. ISSN: 2196-7350.
Detail

BENDOVÁ, M.; GISPERT-GUIRADO, F.; HASSEL, A.; LLOBET, E.; MOZALEV, A. Solar water splitting on porous-alumina-assisted TiO2-doped WOx nanorod photoanodes: Paradoxes and challenges. Nano Energy, 2017, no. 33, p. 72-87. ISSN: 2211-2855.
Detail

MOZALEV, A.; BACCAR, H.; ABDELGHANI, A. Preparation and biosensing performance of porous-alumina-assisted gold nanostructures on substrates. In Eurosensors XXX International Conference. Procedia Engineering. Netherlands: Elsevier, 2016. p. 1188-1191. ISSN: 1877-7058.
Detail

MOZALEV, A. Preparation of gold nanostructure arrays via porous-alumina-assisted anodizing/electrodeposition on mixed-metal substrates. Book of abstracts of the 11th International Symposium on Electrochemical Micro & Nanosystem Technologies (EMNT2016), 17-19 Aug. 2016. Brussels, Belgium: 2016. p. 5-5.
Detail

PYTLÍČEK, Z. MIKROSENZORY PLYNŮ ZALOŽENÉ NA SAMOUSPOŘÁDANÝCH 3D NANOVRSTVÁCH OXIDŮ KOVŮ. 2017. s. 1-163.
Detail

VAZQUEZ, R.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A.: IEEE Sensors 2014. Valencia, Spain (03.11.2014)
Detail

Responsibility: Mozalev Alexander, Dr.