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Project detail
Duration: 01.03.2017 — 28.02.2018
Funding resources
Brno University of Technology - Vnitřní projekty VUT
- whole funder (2017-01-01 - 2018-12-31)
On the project
The aim of this project is the study of a novel structure for graphene monolayer physical properties control and its characterization. The properties are controlled by strain of MEMS/NEMS piezoelectric resonator and by electric field of FET structure. This approach of fabrication CMOS-compatible and biocompatible tunable frequency-modulated piezoelectric MEMS/NEMS resonators with graphene monolayer should be very useful in many fields for molecule level detection. There is no limit to measure concentration in units of ppb in terms of structure design.
Mark
FEKT/STI-J-17-4136
Default language
Czech
People responsible
Hubálek Jaromír, prof. Ing., Ph.D. - fellow researcherPekárek Jan, doc. Ing., Ph.D. - fellow researcherSomer Jakub, Ing., PhD. - fellow researcherGablech Imrich, Ing., Ph.D. - principal person responsible
Units
Central European Institute of Technology BUT- beneficiary (2017-01-01 - 2017-12-31)Department of Microelectronics- internal (2017-01-01 - 2017-12-31)Faculty of Electrical Engineering and Communication- internal (2017-01-01 - 2017-12-31)
Results
GABLECH, I.; CAHA, O.; SVATOŠ, V.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T. Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source. Thin Solid Films, 2017, vol. 638, no. NA, p. 57-62. ISSN: 0040-6090.Detail
GABLECH, I.; CAHA, O.; SVATOŠ, V.; PRÁŠEK, J.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T. Preparation of [001] Oriented Titanium Thin Film for MEMS Applications by Kaufman Ion-beam Source. In Proceedings of 9 th International conference Nanocon 2017. 1. Ostrava: Tanger, 2018. p. 117-122. ISBN: 978-80-87294-59-8.Detail
GABLECH, I.; PEKÁREK, J.; KLEMPA, J.; SVATOŠ, V.; SAJEDI-MOGHADDAM, A.; NEUŽIL, P.; PUMERA, M. Monoelemental 2D Materials-based Field Effect Transistors for Sensing and Biosensing: Phosphorene, Antimonene, Arsenene, Silicene, and Germanene go beyond Graphene. TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 2018, vol. 105, no. NA, p. 251-262. ISSN: 0165-9936.Detail
GABLECH, I.; SVATOŠ, V.; CAHA, O.; DUBROKA, A.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.; SCHNEIDER, M.; ŠIKOLA, T. Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup. Thin Solid Films, 2019, vol. 670, no. NA, p. 105-112. ISSN: 0040-6090.Detail
GABLECH, I.; SOMER, J.; FOHLEROVÁ, Z.; SVATOŠ, V.; PEKÁREK, J.; KURDÍK, S.; FENG, J.; FECKO, P.; PODEŠVA, P.; HUBÁLEK, J.; NEUŽIL, P. Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating. Microfluidics and Nanofluidics, 2018, vol. 22, no. 9, p. 1-7. ISSN: 1613-4990.Detail
GABLECH, I.; PEKÁREK, J.; KLEMPA, J.; VYROUBAL, P.; SVATOŠ, V.; NEUŽIL, P. A New Method for 2D Materials Properties Modulation by Controlled Induced Mechanical Strain. In Proceedings, Eurosensors 2018. Proceedings. Basel, Switzerland: MDPI, 2018. p. 1-5. ISSN: 2504-3900.Detail
GABLECH, I.; SOMER, J.; FOHLEROVÁ, Z.; KURDÍK, S.; PEKÁREK, J.; FECKO, P.; SVATOŠ, V.; HUBÁLEK, J.; NEUŽIL, P.: Utopené mikrokanály; Utopené mikrokanály pro mikrofluidiku. Laboratoř 0.67 UMEL, VUT, Technická 10, Brno. URL: http://www.umel.feec.vutbr.cz/LabSensNano/products.aspx?id=134. (funkční vzorek)Detail