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Project detail
Duration: 01.01.2019 — 31.12.2021
Funding resources
Technologická agentura ČR - Program na podporu aplikovaného výzkumu a experimentálního vývoje EPSILON (2015-2025)
- part funder
On the project
Projekt je zaměřen na vývoj unikátního rentgenového tomografu (XCT) s prostorovým rozlišením pod 100 nm a vysokým aplikačním potenciálem pro elektrotechnický průmysl.
Description in EnglishThe project has two objectives. The first objective is to develop an X-ray camera for a nanoXCT system with a world-class spatial resolution of less than 100 nm and applications in microelectronics. Two functional samples, a scintillation detector, and X-ray camera will be prepared within 3 years. The X-ray camera will be protected as an industrial sample. The second objective encompasses development of correlative methods for tomographic analysis of structures. In particular, workflow integration and evaluation of materials and structures in microelectronics will be a key topic. The project will promote collaboration among partners with the IKTS in Germany. The result enables the creation of a tomographic system (nanoXCT) and methods for defect inspection in microelectronic components.
Keywordsdetektory ionizující záření; rtg kamera; nanoCT
Key words in EnglishIonizing radiation detectors, X-ray camera, nanoCT, correlation, tomography, 3D analysis, SIMS, XCT, SPM, SEM, AES, electron and ion imaging, microelectronics industry, defect analysis, failure analysis
Mark
TH04010525
Default language
Czech
People responsible
Potoček Michal, Ing., Ph.D. - fellow researcherBábor Petr, doc. Ing., Ph.D. - principal person responsible
Units
Fabrication and Characteris. of Nanostr.- beneficiary (2018-04-11 - not assigned)