Project detail

Process monitoring and failure analysis solutions for energy-efficient devices and products in microelectronics

Duration: 01.01.2019 — 31.12.2021

Funding resources

Technologická agentura ČR - Program na podporu aplikovaného výzkumu a experimentálního vývoje EPSILON (2015-2025)

- part funder

On the project

Projekt je zaměřen na vývoj unikátního rentgenového tomografu (XCT) s prostorovým rozlišením pod 100 nm a vysokým aplikačním potenciálem pro elektrotechnický průmysl.

Description in English
The project has two objectives. The first objective is to develop an X-ray camera for a nanoXCT system with a world-class spatial resolution of less than 100 nm and applications in microelectronics. Two functional samples, a scintillation detector, and X-ray camera will be prepared within 3 years. The X-ray camera will be protected as an industrial sample. The second objective encompasses development of correlative methods for tomographic analysis of structures. In particular, workflow integration and evaluation of materials and structures in microelectronics will be a key topic. The project will promote collaboration among partners with the IKTS in Germany. The result enables the creation of a tomographic system (nanoXCT) and methods for defect inspection in microelectronic components.

Keywords
detektory ionizující záření; rtg kamera; nanoCT

Key words in English
Ionizing radiation detectors, X-ray camera, nanoCT, correlation, tomography, 3D analysis, SIMS, XCT, SPM, SEM, AES, electron and ion imaging, microelectronics industry, defect analysis, failure analysis

Mark

TH04010525

Default language

Czech

People responsible

Potoček Michal, Ing., Ph.D. - fellow researcher
Bábor Petr, doc. Ing., Ph.D. - principal person responsible

Units

Fabrication and Characteris. of Nanostr.
- beneficiary (2018-04-11 - not assigned)