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CHMELA, O. STARÝ, J. ŠUBARDA, J. ČUDEK, P. PRÁŠEK, J. ČÍŽEK, J.
Original Title
Polyethylenterepthalate surface pretreatment
Type
conference proceedings
Language
English
Original Abstract
Polyethylenterepthalate (PET) pretreatment is one of the most important steps for reliable copper conductive structure realization. Two types of pretreatments were tested. Chemical pretreatment with NaOH and physical pretreatment with plasma. Thin copper layer on PET surface was realized with cathode Cu sputtering. Photolithography techniques were used for preparing open areas for electrochemical copper plating and than differential Cu etching for conductive structures formation. Properties of pretreatments were evaluated with different methods: AFM, contact angle measurement, surface energies calculation and scratch test.
Keywords
Polyehthylenterepthalate (PET), pretreatment, cathode Cu sputtering, AFM method, contact angle, scratch test, surface energy
Authors
CHMELA, O.; STARÝ, J.; ŠUBARDA, J.; ČUDEK, P.; PRÁŠEK, J.; ČÍŽEK, J.
RIV year
2013
Released
26. 6. 2013
Publisher
Vysoké učení technické v Brně
Location
Brno
ISBN
978-80-214-4754-7
Book
Electronic Devices and Systems, IMAPS CS International Conference 2013
Edition
1
Edition number
Pages from
205
Pages to
209
Pages count
5
BibTex
@proceedings{BUT101211, editor="Ondřej {Chmela} and Jiří {Starý} and Jiří {Šubarda} and Pavel {Čudek} and Jan {Prášek} and Jan {Čížek}", title="Polyethylenterepthalate surface pretreatment", year="2013", series="1", number="1", pages="205--209", publisher="Vysoké učení technické v Brně", address="Brno", isbn="978-80-214-4754-7" }