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PEKÁREK, J. VRBA, R. MAGÁT, M. CHOMOUCKÁ, J. PRÁŠEK, J. HUBÁLEK, J. JAŠEK, O. ZAJÍČKOVÁ, L.
Original Title
Carbon Nanotube Emitters in Sensoric Application
Type
conference proceedings
Language
English
Original Abstract
A contemporary approach to study the emission properties of carbon nanotubes (CNTs) in low distances between two electrodes is described in this paper. The method could be used in modern MEMS pressure sensor applications. The field emission works on the principle that the field emission current is correlated with the electrical field intensity, i.e., the anode-emitter distance when the applied voltage is fixed. This means that the CNTs array serves as the emitter source of electrons between the cathode and the anode in the electric field. The measurement of emission current density flowing through the electrodes is carried out in a vacuum chamber pumped by a turbomolecular pump. The vacuum chamber is equipped with a linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber (step width from 50 nm to 1000 nm, sub-nanometer resolution). For this experiment, CNTs are deposited using a thermal chemical vapour deposition.
Keywords
carbon nanotubes; emission properies; thermal chemical vapour deposition; microwave torch deposition
Authors
PEKÁREK, J.; VRBA, R.; MAGÁT, M.; CHOMOUCKÁ, J.; PRÁŠEK, J.; HUBÁLEK, J.; JAŠEK, O.; ZAJÍČKOVÁ, L.
Released
25. 8. 2013
Publisher
IARIA
Location
Barcelona
ISBN
978-1-61208-303-2
Book
Conference Proceedings - ICQNM 2013
Edition
1
Pages from
67
Pages to
70
Pages count
4
BibTex
@proceedings{BUT102638, editor="Jan {Pekárek} and Radimír {Vrba} and Martin {Magát} and Jana {Pekárková} and Jan {Prášek} and Jaromír {Hubálek} and Ondřej {Jašek} and Lenka {Zajíčková}", title="Carbon Nanotube Emitters in Sensoric Application", year="2013", series="1", pages="67--70", publisher="IARIA", address="Barcelona", isbn="978-1-61208-303-2" }