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ŠTEKOVIČ, M.; ŠANDERA, J.
Original Title
3D structure with opened cavities in low shrinkage LTCC
English Title
Type
Peer-reviewed article not indexed in WoS or Scopus
Original Abstract
This paper is focused on design and fabrication of a three-dimensional (3D) structured module with opened cavities in Low Temperature Co-fired Ceramic (LTCC) substrate. The structure is built up by the uniaxial thermo-compression lamination. This process is one of the simplest, but it brings up some limitations for structure creating. It was also investigated effect of the pseudo-isostatic lamination. The Heraeus Heralock 2000 substrate with near zero shrinkage was used. The research goal is to find an optimal method of 3D structure with opened cavities production by means of error limiting and increasing reproducibility.
English abstract
Keywords
Deformation, Lamination, Low Temperature Co-fired Ceramics, Opened Cavities
Key words in English
Authors
Released
11.11.2013
Publisher
UAB
Location
Alba Iulia
ISBN
2161-2528
Periodical
Conference proceedings (International Spring Seminar on Electronics Technology)
Volume
36
Number
11
State
United States of America
Pages from
74
Pages to
78
Pages count
5
BibTex
@article{BUT103014, author="Michal {Štekovič} and Josef {Šandera}", title="3D structure with opened cavities in low shrinkage LTCC", journal="Conference proceedings (International Spring Seminar on Electronics Technology)", year="2013", volume="36", number="11", pages="74--78", issn="2161-2528" }