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SHÁNĚL, O. ZLÁMAL, J. ORAL, M.
Original Title
Calculation of the performance of magnetic lenses with limited machining precision
Type
journal article in Web of Science
Language
English
Original Abstract
To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.
Keywords
Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens
Authors
SHÁNĚL, O.; ZLÁMAL, J.; ORAL, M.
RIV year
2014
Released
1. 2. 2014
ISBN
0304-3991
Periodical
Ultramicroscopy
Year of study
137
Number
1
State
Kingdom of the Netherlands
Pages from
Pages to
6
Pages count
BibTex
@article{BUT103136, author="Ondřej {Sháněl} and Jakub {Zlámal} and Martin {Oral}", title="Calculation of the performance of magnetic lenses with limited machining precision", journal="Ultramicroscopy", year="2014", volume="137", number="1", pages="1--6", doi="10.1016/j.ultramic.2013.10.004", issn="0304-3991" }