Publication detail

Nanoelectrodes for biophysical measurements

MÁRIK, M. HUBÁLEK, J.

Original Title

Nanoelectrodes for biophysical measurements

English Title

NANOELECTRODES FOR BIOPHYSICAL MEASURMENTS

Type

conference proceedings

Language

Czech

Original Abstract

In -vivo impedance measurement of cells is the objective of current scientific research in area of biological sciences. The problem that needs to be solved is how the cells can be contacted with electrodes. One possible solution can be based on nanoelectrodes that could be fabricated dueto current high technology level. The main goal of this work is to design and create nanoelectrodes using thin-film techniques together with lithography and nanotechniques developed in LabSensNano.The work is engaged in UV and e-beam lithography,and in preparation of silicon wafers. Furthermore a brief electrodes design, fabrication concept and current state of the experiment are proposed.

English abstract

In -vivo impedance measurement of cells is the objective of current scientific research in area of biological sciences. The problem that needs to be solved is how the cells can be contacted with electrodes. One possible solution can be based on nanoelectrodes that could be fabricated dueto current high technology level. The main goal of this work is to design and create nanoelectrodes using thin-film techniques together with lithography and nanotechniques developed in LabSensNano.The work is engaged in UV and e-beam lithography,and in preparation of silicon wafers. Furthermore a brief electrodes design, fabrication concept and current state of the experiment are proposed.

Keywords

Lithography, photoresist, cleaning, nanoelectrodes, masking, wave length, developing

Key words in English

Lithography, photoresist, cleaning, nanoelectrodes, masking, wave length, developing

Authors

MÁRIK, M.; HUBÁLEK, J.

Released

28. 4. 2011

Publisher

NOVPRESS

Location

Brno

ISBN

978-80-214-4271-9

Book

Proceedings of the 17th confernce EEICT

Edition

1

Edition number

1

Pages from

105

Pages to

108

Pages count

3

BibTex

@proceedings{BUT105496,
  editor="Marian {Márik} and Jaromír {Hubálek}",
  title="Nanoelectrodes for biophysical measurements",
  year="2011",
  series="1",
  number="1",
  pages="105--108",
  publisher="NOVPRESS",
  address="Brno",
  isbn="978-80-214-4271-9"
}