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MÁRIK, M. HUBÁLEK, J.
Original Title
Nanoelectrodes for biophysical measurements
English Title
NANOELECTRODES FOR BIOPHYSICAL MEASURMENTS
Type
conference proceedings
Language
Czech
Original Abstract
In -vivo impedance measurement of cells is the objective of current scientific research in area of biological sciences. The problem that needs to be solved is how the cells can be contacted with electrodes. One possible solution can be based on nanoelectrodes that could be fabricated dueto current high technology level. The main goal of this work is to design and create nanoelectrodes using thin-film techniques together with lithography and nanotechniques developed in LabSensNano.The work is engaged in UV and e-beam lithography,and in preparation of silicon wafers. Furthermore a brief electrodes design, fabrication concept and current state of the experiment are proposed.
English abstract
Keywords
Lithography, photoresist, cleaning, nanoelectrodes, masking, wave length, developing
Key words in English
Authors
MÁRIK, M.; HUBÁLEK, J.
Released
28. 4. 2011
Publisher
NOVPRESS
Location
Brno
ISBN
978-80-214-4271-9
Book
Proceedings of the 17th confernce EEICT
Edition
1
Edition number
Pages from
105
Pages to
108
Pages count
3
BibTex
@proceedings{BUT105496, editor="Marian {Márik} and Jaromír {Hubálek}", title="Nanoelectrodes for biophysical measurements", year="2011", series="1", number="1", pages="105--108", publisher="NOVPRESS", address="Brno", isbn="978-80-214-4271-9" }