Publication detail

MECHANICAL AND ELECTRICAL PROPERTIES OF EVAPORATED THIN LAYERS

VEJMOLA, T. YAHYA, D. ŠANDERA, J.

Original Title

MECHANICAL AND ELECTRICAL PROPERTIES OF EVAPORATED THIN LAYERS

Type

conference paper

Language

English

Original Abstract

The study describes process and results of resistivity measuring of thin layers that were evaporated with different input parameters. Input parameters are e.g. samples rating before evaporation start. Other experiment analyzed sample vibration influence on appearance and resistivity of the evaporated layer.

Keywords

measure the resistivity, SHEET RESISTANCE

Authors

VEJMOLA, T.; YAHYA, D.; ŠANDERA, J.

RIV year

2014

Released

25. 6. 2014

ISBN

978-80-214-4985-5

Book

EDS 14 imapcsinternational conference proceedings

Pages from

150

Pages to

153

Pages count

154

BibTex

@inproceedings{BUT108110,
  author="Tomáš {Vejmola} and Doaa {W. F. Yahya} and Josef {Šandera}",
  title="MECHANICAL AND ELECTRICAL PROPERTIES OF EVAPORATED THIN LAYERS",
  booktitle="EDS 14 imapcsinternational conference proceedings",
  year="2014",
  pages="150--153",
  isbn="978-80-214-4985-5"
}