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VEJMOLA, T. YAHYA, D. ŠANDERA, J.
Original Title
MECHANICAL AND ELECTRICAL PROPERTIES OF EVAPORATED THIN LAYERS
Type
conference paper
Language
English
Original Abstract
The study describes process and results of resistivity measuring of thin layers that were evaporated with different input parameters. Input parameters are e.g. samples rating before evaporation start. Other experiment analyzed sample vibration influence on appearance and resistivity of the evaporated layer.
Keywords
measure the resistivity, SHEET RESISTANCE
Authors
VEJMOLA, T.; YAHYA, D.; ŠANDERA, J.
RIV year
2014
Released
25. 6. 2014
ISBN
978-80-214-4985-5
Book
EDS 14 imapcsinternational conference proceedings
Pages from
150
Pages to
153
Pages count
154
BibTex
@inproceedings{BUT108110, author="Tomáš {Vejmola} and Doaa {W. F. Yahya} and Josef {Šandera}", title="MECHANICAL AND ELECTRICAL PROPERTIES OF EVAPORATED THIN LAYERS", booktitle="EDS 14 imapcsinternational conference proceedings", year="2014", pages="150--153", isbn="978-80-214-4985-5" }