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NEČAS, D. ČUDEK, V. VODÁK, J. OHLÍDAL, M. KLAPETEK, P. ZAJÍČKOVÁ, L.
Original Title
Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry
Type
journal article in Web of Science
Language
English
Original Abstract
The construction of a normal-incidence imaging spectrophotometer for mapping of thin film properties is described. It is based on an on-axis reflective imaging system, utilising a telescope-like arrangement. A charge-coupled device camera is used as the detector, permitting measurements in the spectral range of 275-1100 nm with resolution of 37 square micrometers. The performance of the instrument is demonstrated by optical characterisation of highly non-uniform thin films deposited from hexamethyldisiloxane on silicon substrates by a single capillary plasma jet at atmospheric pressure. The imaging spectrophotometry is used as a self-sufficient technique for the determination of both the film optical constants and maps of local thickness. The thickness maps are compared with the results of conventional thickness profile characterisation methods, profilometry and atomic force microscopy and the differences and errors are discussed.
Keywords
imaging spectrophotometry; micro-plasma jet; non-uniform thin films; optical properties; thickness mapping
Authors
NEČAS, D.; ČUDEK, V.; VODÁK, J.; OHLÍDAL, M.; KLAPETEK, P.; ZAJÍČKOVÁ, L.
RIV year
2014
Released
13. 10. 2014
Publisher
IOP PUBLISHING LTD
Location
TEMPLE CIRCUS, TEMPLE WAY, BRISTOL BS1 6BE, ENGLAND
ISBN
0957-0233
Periodical
Measurement Science and Technology
Year of study
25
Number
11
State
United Kingdom of Great Britain and Northern Ireland
Pages from
1
Pages to
9
Pages count
BibTex
@article{BUT109014, author="David {Nečas} and Vladimír {Čudek} and Jiří {Vodák} and Miloslav {Ohlídal} and Petr {Klapetek} and Lenka {Zajíčková}", title="Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry", journal="Measurement Science and Technology", year="2014", volume="25", number="11", pages="1--9", doi="10.1088/0957-0233/25/11/115201", issn="0957-0233" }