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PEKÁREK, J. VRBA, R. PRÁŠEK, J. JAŠEK, O. MAJZLÍKOVÁ, P. PEKÁRKOVÁ, J. ZAJÍČKOVÁ, L.
Original Title
MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study
Type
journal article in Web of Science
Language
English
Original Abstract
The pressure sensor application gained recently substantial interest in many fields of basic and applied research and applications. In our work microelectromechanical system based pressure sensor contains nanostructured electrode consisting of carbon nanotube array. Carbon nanotubes are directly grown on such electrode by plasma enhanced chemical vapor deposition method using microwave plasma torch at atmospheric pressure. This growth method enables us to use much simple electrode structure without need of buffer layer and time-consuming lithography process. Combination of carbon nanotubes field emission and MEMS membrane mechanical properties make possible to enhance sensitivity of the sensor. Field emission properties of carbon nanotubes are measured by newly developed system enabling us precise measurement of expecting properties such as dependence on diaphragm (upper electrode) distance, applied voltage and stability of the sensor. Measured values are compared to numerical modeling of the membrane system in CoventorWare software by finite element method. We also suggest to encapsulate the sensor using glass frit bonding because such method is more suitable for high vacuum requirements of the field emission operation.
Keywords
carbon nanotubes, field emitter arrays, microelectromechanical systems, microwave torch
Authors
PEKÁREK, J.; VRBA, R.; PRÁŠEK, J.; JAŠEK, O.; MAJZLÍKOVÁ, P.; PEKÁRKOVÁ, J.; ZAJÍČKOVÁ, L.
RIV year
2015
Released
1. 3. 2015
Publisher
IEEE Sensors Council
Location
445 Hoes Lane, Piscataway, NJ 08855-4141 USA
ISBN
1530-437X
Periodical
IEEE SENSORS JOURNAL
Year of study
15
Number
3
State
United States of America
Pages from
1430
Pages to
1436
Pages count
7
URL
http://dx.doi.org/10.1109/JSEN.2014.2363213
BibTex
@article{BUT110024, author="Jan {Pekárek} and Radimír {Vrba} and Jan {Prášek} and Ondřej {Jašek} and Petra {Majzlíková} and Jana {Pekárková} and Lenka {Zajíčková}", title="MEMS Carbon Nanotubes Field Emission Pressure Sensor with simplified design: performance and field emission properties study", journal="IEEE SENSORS JOURNAL", year="2015", volume="15", number="3", pages="1430--1436", doi="10.1109/JSEN.2014.2363213", issn="1530-437X", url="http://dx.doi.org/10.1109/JSEN.2014.2363213" }