Publication detail

In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS

ČECHAL, J., TICHOPÁDEK, P., NEBOJSA, A., BONAVENTUROVÁ - ZRZAVECKÁ, O., URBÁNEK, M., NAVRÁTIL, K., ŠIKOLA, T.

Original Title

In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS

Type

conference paper

Language

English

Original Abstract

Degradation of PMPSi under temperature and UV light uder UHV conditions studied by XPS and spectroscopic ellipsometry.

Key words in English

XPS, PMPSi, spectroscopic ellipsometry

Authors

ČECHAL, J., TICHOPÁDEK, P., NEBOJSA, A., BONAVENTUROVÁ - ZRZAVECKÁ, O., URBÁNEK, M., NAVRÁTIL, K., ŠIKOLA, T.

RIV year

2003

Released

6. 10. 2003

Publisher

ECASIA

Location

Berlin

Pages from

226

Pages to

226

Pages count

1

BibTex

@inproceedings{BUT11096,
  author="Jan {Čechal} and Petr {Tichopádek} and Alois {Nebojsa} and Olga {Bonaventurová - Zrzavecká} and Michal {Urbánek} and Karel {Navrátil} and Tomáš {Šikola}",
  title="In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS",
  booktitle="ECASIA 10 Book of Abstracts",
  year="2003",
  pages="1",
  publisher="ECASIA",
  address="Berlin"
}