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VAZQUEZ, R. MOZALEV, A. LLOBET, E.
Original Title
Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers
Type
conference paper
Language
English
Original Abstract
Nanostructured niobium oxide semiconductor is gaining increasing attention as electro-optic and gas sensing material. However, the preparation of stable niobium oxide nanofilm with reproducible morphology and behaviour remains a challenge. Here we describe a rapid and well-controlled approach to synthesize a niobium oxide film with the columnlike nanostructured morphology via anodic processing of Al/Nb metal layers sputtered onto an oxide-coated Si wafer. The film is developed due to the growth of a nanoporous anodic alumina layer followed by pore-directed oxidation of the Nb underlayer. The post-anodizing treatment results in the controlled formation of Nb2O5 crystal phase, which causes the transformation from dielectric to n-type semiconductor behavior of the film. A laboratory gas sensor fabricated by uniting the anodizing approach developed here with standard micromachining technologies shows superior characteristics for hydrogen gas detection, the response-recovery time being among best ever reported
Keywords
niobium oxide, anodizing, porous alumina, nanostructure, hydrogen sensor
Authors
VAZQUEZ, R.; MOZALEV, A.; LLOBET, E.
RIV year
2014
Released
31. 12. 2014
Publisher
Elsevier
Location
Netherlands
ISBN
978-1-5108-0586-6
Book
SOLID-STATE TRANSDUCERS. EUROPEAN CONFERENCE. 28TH 2014. (EUROSENSORS 2014)
1877-7058
Periodical
Procedia Engineering
Year of study
87
Number
-
State
Kingdom of the Netherlands
Pages from
811
Pages to
814
Pages count
4
URL
https://www.sciencedirect.com/science/article/pii/S1877705814027969
Full text in the Digital Library
http://hdl.handle.net/11012/194753
BibTex
@inproceedings{BUT111098, author="Rosa Maria {Vazquez} and Alexander {Mozalev} and Eduard {Llobet}", title="Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers", booktitle="SOLID-STATE TRANSDUCERS. EUROPEAN CONFERENCE. 28TH 2014. (EUROSENSORS 2014)", year="2014", journal="Procedia Engineering", volume="87", number="-", pages="811--814", publisher="Elsevier", address="Netherlands", doi="10.1016/j.proeng.2014.11.674", isbn="978-1-5108-0586-6", issn="1877-7058", url="https://www.sciencedirect.com/science/article/pii/S1877705814027969" }