Publication detail

Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system

KLAPETEK, P. VALTR, M. MARTINEK, J.

Original Title

Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system

Type

journal article in Web of Science

Language

English

Original Abstract

We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described.

Keywords

scanning probe microscopy, high-speed SPM, metrology

Authors

KLAPETEK, P.; VALTR, M.; MARTINEK, J.

RIV year

2015

Released

20. 1. 2015

ISBN

0957-4484

Periodical

NANOTECHNOLOGY

Year of study

26

Number

6

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

10

Pages count

10

BibTex

@article{BUT112268,
  author="Petr {Klapetek} and Miroslav {Valtr} and Jan {Martinek}",
  title="Large area high-speed metrology SPM system Large area high-speed metrology SPM system Large area high-speed metrology SPM system",
  journal="NANOTECHNOLOGY",
  year="2015",
  volume="26",
  number="6",
  pages="1--10",
  doi="10.1088/0957-4484/26/6/065501",
  issn="0957-4484"
}