Publication detail

Transparent Protective Coating by Plasma Polymerization of Vinyltrimethylsilane or Hexamethyldisilazane and Oxygen Post-treatment

CHEN, K. LIU, W. ČECH, V. INAGAKI, N.

Original Title

Transparent Protective Coating by Plasma Polymerization of Vinyltrimethylsilane or Hexamethyldisilazane and Oxygen Post-treatment

Type

abstract

Language

English

Original Abstract

functional and well adhesive organic silicon thin film, which provides lower refractive index and the structure can be changed from organic to inorganic after oxygen plasma oxidation. In this study, we compared films deposited from RF plasma (13.56 MHz) vinyltetramethylsilane gas (VTMS, monomer) or hexamethyldisilazane (HMDSZ) on silicon wafers, PET, and glass sheet substrates. Substrates were post-treated by using oxygen plasma to create stable hydrophilic oxide surface. Results show that the growth rate of film thickness deposited on glass and silicon by VTMS or HMDSZ under 30W, 100mtorr, is about 14nm/min. The water contact angle of surface increased from 40 to about 90 degree, indicating the hydrophobic and kept stable for 10 days. However, after oxygen plasma post treatment, the surface turned from hydrophobic to hydrophilic, as water contact angle changed from 90 to about 15 degrees for HMDSZ (40 mtorr, 3 min, 25 W), and 25 degrees for VTMS(25W, 60mtorr, 5min). The transmittance rate of thin film in UV-VIS spectra modified glass was increased from 90 to 94%. The refractive index of deposited films was 1.46~1.50 in HMDSZ or VTMS.

Keywords

plasma polymerization; thin films

Authors

CHEN, K.; LIU, W.; ČECH, V.; INAGAKI, N.

Released

15. 9. 2014

Location

Germany

Pages from

1

Pages to

1

Pages count

1

BibTex

@misc{BUT114078,
  author="Ko-Shao {Chen} and Wan-Yu {Liu} and Vladimír {Čech} and Norihiro {Inagaki}",
  title="Transparent Protective Coating by Plasma Polymerization of
Vinyltrimethylsilane or Hexamethyldisilazane and Oxygen
Post-treatment",
  year="2014",
  pages="1--1",
  address="Germany",
  note="abstract"
}