Publication detail

Nanostructures Fabrication using Self-Ordering Techniques

HUBÁLEK, J.

Original Title

Nanostructures Fabrication using Self-Ordering Techniques

Type

conference paper

Language

English

Original Abstract

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

Keywords

Self-ordering, nanopores, nanorods, nanowires

Authors

HUBÁLEK, J.

RIV year

2004

Released

9. 9. 2004

Publisher

Ing. Zdeněk Novotný, CSc.

Location

Brno

ISBN

80-214-2701-9

Book

The 11th Electronic Devices and Systems

Edition number

první

Pages from

260

Pages to

264

Pages count

5

BibTex

@inproceedings{BUT11425,
  author="Jaromír {Hubálek}",
  title="Nanostructures Fabrication using Self-Ordering Techniques",
  booktitle="The 11th Electronic Devices and Systems",
  year="2004",
  volume="11",
  number="první",
  pages="5",
  publisher="Ing. Zdeněk Novotný, CSc.",
  address="Brno",
  isbn="80-214-2701-9"
}