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Publication detail
HUBÁLEK, J.
Original Title
Nanostructures Fabrication using Self-Ordering Techniques
Type
conference paper
Language
English
Original Abstract
The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).
Keywords
Self-ordering, nanopores, nanorods, nanowires
Authors
RIV year
2004
Released
9. 9. 2004
Publisher
Ing. Zdeněk Novotný, CSc.
Location
Brno
ISBN
80-214-2701-9
Book
The 11th Electronic Devices and Systems
Edition number
první
Pages from
260
Pages to
264
Pages count
5
BibTex
@inproceedings{BUT11425, author="Jaromír {Hubálek}", title="Nanostructures Fabrication using Self-Ordering Techniques", booktitle="The 11th Electronic Devices and Systems", year="2004", volume="11", number="první", pages="5", publisher="Ing. Zdeněk Novotný, CSc.", address="Brno", isbn="80-214-2701-9" }