Publication detail

Application of CBCM Method to Nonlinear Capacitor Characterization

SUTORÝ, T., KOLKA, Z.

Original Title

Application of CBCM Method to Nonlinear Capacitor Characterization

English Title

Application of CBCM Method to Nonlinear Capacitor Characterization

Type

conference paper

Language

Czech

Original Abstract

The paper deals with an application of the CBCM method (Charge-Based Capacitance Measurements) to nonlinear capacitance characterization. Since its invention the CBCM method has been extensively used for on-chip interconnect linear capacitance measurements. However, it can be also used for nonlinear device characterization. Application of CBCM to 0.35-um CMOS gate-capacitance measurements is presented.

Key words in English

Charge-Based Capacitance Measurements, MOS characterization, Test Structures

Authors

SUTORÝ, T., KOLKA, Z.

RIV year

2004

Released

13. 9. 2004

Publisher

Poznan University of Technology, PTETiS

Location

Poznan

ISBN

83-906074-7-6

Book

International Conference on Signals and Electronic Systems

Pages from

119

Pages to

121

Pages count

3

BibTex

@inproceedings{BUT11455,
  author="Tomáš {Sutorý} and Zdeněk {Kolka}",
  title="Application of CBCM Method to Nonlinear Capacitor Characterization",
  booktitle="International Conference on Signals and Electronic Systems",
  year="2004",
  volume="2004",
  pages="3",
  publisher="Poznan University of Technology, PTETiS",
  address="Poznan",
  isbn="83-906074-7-6"
}