Publication detail
Electron beam lithography of graphene Hall-bar for micro-contacting
HRABOVSKÝ, M.
Original Title
Electron beam lithography of graphene Hall-bar for micro-contacting
Type
conference proceedings
Language
English
Original Abstract
Overview of the preperation and shaping of graphene into Hall-bar like structures for nanosensoric applications.
Keywords
Grapehen, Hall-bar, EBL, plasma etching, HSQ, PMMA
Authors
HRABOVSKÝ, M.
Released
23. 4. 2015
Publisher
MUNI PRESS
Location
Brno
ISBN
978-80-210-7825-3
Book
Ceitec PHD Retreat
Edition
1.
Edition number
1
Pages from
95
Pages to
95
Pages count
1
BibTex
@proceedings{BUT115736,
editor="Miloš {Hrabovský}",
title="Electron beam lithography of graphene Hall-bar for micro-contacting",
year="2015",
series="1.",
number="1",
pages="95--95",
publisher="MUNI PRESS",
address="Brno",
isbn="978-80-210-7825-3"
}