Publication detail

Optical pressure sensors in LTCC technology

SOMER, J. URBAN, F. URBAN, F. SZENDIUCH, I.

Original Title

Optical pressure sensors in LTCC technology

Type

conference proceedings

Language

English

Original Abstract

This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.

Keywords

Low Temperature Co-fired Ceramic, pressure sensors, Fabry-Pérot resonator, Fiber Bragg Grating

Authors

SOMER, J.; URBAN, F.; URBAN, F.; SZENDIUCH, I.

Released

15. 10. 2015

ISBN

978-80-214-5270-1

Book

Abstracts Proceedings, International flash conference IMAPS - Czech and Slovak chapter

Pages from

41

Pages to

42

Pages count

2

BibTex

@proceedings{BUT119070,
  editor="Jakub {Somer} and František {Urban} and František {Urban} and Ivan {Szendiuch}",
  title="Optical pressure sensors in LTCC technology",
  year="2015",
  pages="41--42",
  isbn="978-80-214-5270-1"
}