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SOMER, J. URBAN, F. URBAN, F. SZENDIUCH, I.
Original Title
Optical pressure sensors in LTCC technology
Type
conference proceedings
Language
English
Original Abstract
This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.
Keywords
Low Temperature Co-fired Ceramic, pressure sensors, Fabry-Pérot resonator, Fiber Bragg Grating
Authors
SOMER, J.; URBAN, F.; URBAN, F.; SZENDIUCH, I.
Released
15. 10. 2015
ISBN
978-80-214-5270-1
Book
Abstracts Proceedings, International flash conference IMAPS - Czech and Slovak chapter
Pages from
41
Pages to
42
Pages count
2
BibTex
@proceedings{BUT119070, editor="Jakub {Somer} and František {Urban} and František {Urban} and Ivan {Szendiuch}", title="Optical pressure sensors in LTCC technology", year="2015", pages="41--42", isbn="978-80-214-5270-1" }