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KOLOŠOVÁ, J. HRNČÍŘ, T. JIRUŠE, J. RUDOLF, M. ZLÁMAL, J.
Original Title
On the Calculation of SEM and FIB Beam Profiles
Type
journal article in Scopus
Language
English
Original Abstract
In this paper we describe the results of calculations, based on detailed manufacturer’s knowledge of the instrument optical system. This is compared to experimentally measured resolution and the correlation of these data is discussed.
Keywords
Electron optics; Calculations; EOD
Authors
KOLOŠOVÁ, J.; HRNČÍŘ, T.; JIRUŠE, J.; RUDOLF, M.; ZLÁMAL, J.
RIV year
2015
Released
30. 6. 2015
ISBN
1431-9276
Periodical
MICROSCOPY AND MICROANALYSIS
Year of study
21
Number
S4
State
United States of America
Pages from
206
Pages to
211
Pages count
6
BibTex
@article{BUT119197, author="Jolana {Kološová} and Tomáš {Hrnčíř} and Jaroslav {Jiruše} and Miroslav {Rudolf} and Jakub {Zlámal}", title="On the Calculation of SEM and FIB Beam Profiles", journal="MICROSCOPY AND MICROANALYSIS", year="2015", volume="21", number="S4", pages="206--211", doi="10.1017/S1431927615013380", issn="1431-9276" }