Publication detail

On the Calculation of SEM and FIB Beam Profiles

KOLOŠOVÁ, J. HRNČÍŘ, T. JIRUŠE, J. RUDOLF, M. ZLÁMAL, J.

Original Title

On the Calculation of SEM and FIB Beam Profiles

Type

journal article in Scopus

Language

English

Original Abstract

In this paper we describe the results of calculations, based on detailed manufacturer’s knowledge of the instrument optical system. This is compared to experimentally measured resolution and the correlation of these data is discussed.

Keywords

Electron optics; Calculations; EOD

Authors

KOLOŠOVÁ, J.; HRNČÍŘ, T.; JIRUŠE, J.; RUDOLF, M.; ZLÁMAL, J.

RIV year

2015

Released

30. 6. 2015

ISBN

1431-9276

Periodical

MICROSCOPY AND MICROANALYSIS

Year of study

21

Number

S4

State

United States of America

Pages from

206

Pages to

211

Pages count

6

BibTex

@article{BUT119197,
  author="Jolana {Kološová} and Tomáš {Hrnčíř} and Jaroslav {Jiruše} and Miroslav {Rudolf} and Jakub {Zlámal}",
  title="On the Calculation of SEM and FIB Beam Profiles",
  journal="MICROSCOPY AND MICROANALYSIS",
  year="2015",
  volume="21",
  number="S4",
  pages="206--211",
  doi="10.1017/S1431927615013380",
  issn="1431-9276"
}