Publication detail

Non-silicon MEMS platforms for gas sensors

VASILIEV, A. PISLIAKOV, A. SOKOLOV, A. SAMOTAEV, N. SOLOVIEV, S. OBLOV, K. GUARNIERI, V. LORENZELLI, L. BRUNELLI, J. MAGLIONE, A. LIPILIN, A. MOZALEV, A. LEGIN, A.

Original Title

Non-silicon MEMS platforms for gas sensors

Type

journal article in Web of Science

Language

English

Original Abstract

The aim of this work is the demonstration of advanced approaches able to provide non-silicon MEMS platforms for chemical sensor operating under harsh environmental conditions and, on the other hand, to assure microhotplate stable at high temperature, which can be used for the deposition of refractory gas-sensing materials, for example, oxides of gallium, zirconium, or hafnium. Non-silicon materials that can be used for these MEMS platforms include aluminum oxide, yttria-stabilized zirconia and thin borosilicateglass. It was shown that thin ceramic films made of oxide materials can withstand annealing temperature up to 1000 degrees, MEMS sensor based on these films consumes less than 70 mW at continuous heating at 450 degrees and 1 mW in pulsed heating operation mode. Ceramic MEMS show higher stability at high temperaturec ompared with silicon technology based MEMS, whereas power consumption of both types of devices is comparable.

Keywords

Microhotplates, Gas sensors, Ceramic MEMS

Authors

VASILIEV, A.; PISLIAKOV, A.; SOKOLOV, A.; SAMOTAEV, N.; SOLOVIEV, S.; OBLOV, K.; GUARNIERI, V.; LORENZELLI, L.; BRUNELLI, J.; MAGLIONE, A.; LIPILIN, A.; MOZALEV, A.; LEGIN, A.

Released

1. 3. 2016

Publisher

Elsevier B.V.

Location

Netherlands, Radarweg 29, Amsterdam 1043 NX

ISBN

0925-4005

Periodical

Sensors and Actuators B: Chemical

Year of study

224

Number

1

State

Swiss Confederation

Pages from

700

Pages to

713

Pages count

14

URL

http://dx.doi.org/10.1016/j.snb.2015.10.066

BibTex

@article{BUT120403,
  author="Alexey {Vasiliev} and Alexandr {Pisliakov} and Andrey {Sokolov} and Nikolay {Samotaev} and Sergey {Soloviev} and Konstantin {Oblov} and Vittorio {Guarnieri} and Leandro {Lorenzelli} and Jacopo {Brunelli} and Alfredo {Maglione} and Alexandr {Lipilin} and Alexander {Mozalev} and Andrey {Legin}",
  title="Non-silicon MEMS platforms for gas sensors",
  journal="Sensors and Actuators B: Chemical",
  year="2016",
  volume="224",
  number="1",
  pages="700--713",
  doi="10.1016/j.snb.2015.10.066",
  issn="0925-4005",
  url="http://dx.doi.org/10.1016/j.snb.2015.10.066"
}