Publication detail

Modeling C-AFM measurement using FEM

MARTINEK, J. KLAPETEK, P.

Original Title

Modeling C-AFM measurement using FEM

Type

conference paper

Language

English

Original Abstract

The presented work describes a finite element method based modeling of a conductive AFM measurement process. The C-AFM is a scanning probe microscopy technique for mapping electrical properties of a sample together with its topography. The contact resistance between the probe and the rough surface is modeled in two steps - first the problem of mechanical deformation is solved and then the electrical field, and current, is found. The geometry of the model comes from a real sample topography measured using AFM. The whole multiphysics 3D simulation is done for each data point, which makes the problem possible to be solved only using a supercomputer with many simplifications and optimizations.

Keywords

conductive AFM, finite element method, fem

Authors

MARTINEK, J.; KLAPETEK, P.

Released

19. 10. 2015

ISBN

978-80-87294-55-0

Book

Nanocon 2015

Pages from

1

Pages to

6

Pages count

6

BibTex

@inproceedings{BUT120835,
  author="Jan {Martinek} and Petr {Klapetek}",
  title="Modeling C-AFM measurement using FEM",
  booktitle="Nanocon 2015",
  year="2015",
  pages="1--6",
  isbn="978-80-87294-55-0"
}