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KASPAR, P.
Original Title
Local electron-sample interaction during scanning electron microscopy on organic and metallic objects
Type
conference paper
Language
English
Original Abstract
To ascertain how high energy of an electron is needed to acquire a sufficient data yield from organic and metallic sample, a Monte Carlo algorithm is used to compare the behaviour of electrons after contact with the material. Primary electron trajectory, elastic and inelastic scattering and secondary electron generation are described in this paper.
Keywords
SEM, Monte Carlo, Electron scattering, Secondary electron
Authors
Released
28. 4. 2016
Publisher
Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Location
Brno
ISBN
978-80-214-5350-0
Book
Student EEICT Proceedings of the 22nd Student Competition Conference
Edition number
1
Pages from
738
Pages to
742
Pages count
5
BibTex
@inproceedings{BUT124370, author="Pavel {Kaspar}", title="Local electron-sample interaction during scanning electron microscopy on organic and metallic objects", booktitle="Student EEICT Proceedings of the 22nd Student Competition Conference", year="2016", number="1", pages="738--742", publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií", address="Brno", isbn="978-80-214-5350-0" }