Publication detail

Local electron-sample interaction during scanning electron microscopy on organic and metallic objects

KASPAR, P.

Original Title

Local electron-sample interaction during scanning electron microscopy on organic and metallic objects

Type

conference paper

Language

English

Original Abstract

To ascertain how high energy of an electron is needed to acquire a sufficient data yield from organic and metallic sample, a Monte Carlo algorithm is used to compare the behaviour of electrons after contact with the material. Primary electron trajectory, elastic and inelastic scattering and secondary electron generation are described in this paper.

Keywords

SEM, Monte Carlo, Electron scattering, Secondary electron

Authors

KASPAR, P.

Released

28. 4. 2016

Publisher

Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií

Location

Brno

ISBN

978-80-214-5350-0

Book

Student EEICT Proceedings of the 22nd Student Competition Conference

Edition number

1

Pages from

738

Pages to

742

Pages count

5

BibTex

@inproceedings{BUT124370,
  author="Pavel {Kaspar}",
  title="Local electron-sample interaction during scanning electron microscopy on organic and metallic objects",
  booktitle="Student EEICT Proceedings of the 22nd Student Competition Conference",
  year="2016",
  number="1",
  pages="738--742",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií",
  address="Brno",
  isbn="978-80-214-5350-0"
}