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AUTRATA, R., JIRÁK, J., NEDĚLA, V., ŠPINKA, J.
Original Title
Humidity Measurement and Adjustment at Environmental Conditions
Type
conference paper
Language
English
Original Abstract
When we are detecting signal electrons with an ionization detector in ESEM, the most advantageous is to use, with respect to the effectiveness of ionization, environment of water vapours in the specimen chamber. The most suitable are saturated water vapours (relative humidity of 100%). This environment is also advantageous for observation of specimens containing water. At pumping of the specimen chamber to the working pressure (typically around 1000 Pa), in the case of wet specimens, evaporation of specimen can occur, or on the contrary, condensation of water on them. It means, that in some cases the specimen will not remain in the original state. That is why we try to adjust and optimize the pumping procedure and pumping of water vapors to minimize deformation of the observed specimens.
Keywords
Humidity,ESEM,Environmental Conditions
Authors
RIV year
2004
Released
1. 1. 2004
Publisher
Mullerová Ilona
Location
Brno
ISBN
80-239-3246-2
Book
Recent Trends in Charged Patricle Optics and Surface Physics Instrumentation
Edition number
9
Pages from
7
Pages to
8
Pages count
2
URL
http://www.isibrno.cz
BibTex
@inproceedings{BUT12463, author="Rudolf {Autrata} and Josef {Jirák} and Vilém {Neděla} and Jiří {Špinka}", title="Humidity Measurement and Adjustment at Environmental Conditions", booktitle="Recent Trends in Charged Patricle Optics and Surface Physics Instrumentation", year="2004", volume="2004", number="9", pages="2", publisher="Mullerová Ilona", address="Brno", isbn="80-239-3246-2", url="http://www.isibrno.cz" }