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ELBADAWI, C. TRAN, T. KOLÍBAL, M. ŠIKOLA, T. SCOTT, J. CAI, Q. LI, L. TANIGUCHI, T. WATANABE, K. TOTH, M. AHARONOVICH, I. LOBO, C.
Original Title
Electron beam directed etching of hexagonal boron nitride
Type
journal article in Web of Science
Language
English
Original Abstract
Hexagonal boron nitride (hBN) is a wide bandgap van der Waals material with unique optical properties that make it attractive for two dimensional (2D) photonic and optoelectronic devices. However, broad deployment and exploitation of hBN is limited by alack of suitable material and device processing and nano prototyping techniques. Here we present a high resolution, single step electron beam technique for chemical dry etching of hBN. Etching is achieved using H2O as a precursor gas, at both room temperature and elevated hBN temperatures. The technique enables damage-free, nano scale, iterative patterning of supported and suspended 2D hBN, thus opening the door to facile fabrication of hBN-based 2D heterostructures and devices.
Keywords
Boron Nitride; Electron Beam Etching, van der Waals materials
Authors
ELBADAWI, C.; TRAN, T.; KOLÍBAL, M.; ŠIKOLA, T.; SCOTT, J.; CAI, Q.; LI, L.; TANIGUCHI, T.; WATANABE, K.; TOTH, M.; AHARONOVICH, I.; LOBO, C.
Released
28. 9. 2016
Publisher
Royal Society of Chemistry
ISBN
2040-3372
Periodical
Nanoscale
Year of study
8
Number
36
State
United Kingdom of Great Britain and Northern Ireland
Pages from
16182
Pages to
16186
Pages count
5
URL
https://pubs.rsc.org/en/content/articlelanding/2016/NR/C6NR04959A
Full text in the Digital Library
http://hdl.handle.net/11012/203158
BibTex
@article{BUT128626, author="Christopher {Elbadawi} and Trong Toan {Tran} and Miroslav {Kolíbal} and Tomáš {Šikola} and John {Scott} and Qiran {Cai} and Lu Hua {Li} and Takashi {Taniguchi} and Kenji {Watanabe} and Milos {Toth} and Igor {Aharonovich} and Charlene {Lobo}", title="Electron beam directed etching of hexagonal boron nitride", journal="Nanoscale", year="2016", volume="8", number="36", pages="16182--16186", doi="10.1039/c6nr04959a", issn="2040-3372", url="https://pubs.rsc.org/en/content/articlelanding/2016/NR/C6NR04959A" }