Publication detail

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

ŠRÁMEK, J. JANKOVÝCH, R.

Original Title

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Type

journal article in Scopus

Language

English

Original Abstract

The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NNM-1. The aim of this work is to determine accuracy of measurements on this machine.

Keywords

accuracy of measurement, length measurement, measurement repeatability, measurement reproducibility, measurement uncertainty, measuring device, nanometrology, ruby ball

Authors

ŠRÁMEK, J.; JANKOVÝCH, R.

Released

30. 11. 2016

Publisher

MM Science Journal

Location

ČR

ISBN

1805-0476

Periodical

MM Science Journal

Year of study

2016

Number

6

State

Czech Republic

Pages from

1643

Pages to

1647

Pages count

5

URL

http://www.mmscience.eu/content/file/archives/MM_Science_2016203.pdf

BibTex

@article{BUT131340,
  author="Jan {Šrámek} and Róbert {Jankových}",
  title="ACCURACY OF MEASUREMENT IN NANOMETROLOGY",
  journal="MM Science Journal",
  year="2016",
  volume="2016",
  number="6",
  pages="1643--1647",
  doi="10.17973/MMSJ.2016\{_}12\{_}2016203",
  issn="1805-0476",
  url="http://www.mmscience.eu/content/file/archives/MM_Science_2016203.pdf"
}