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KLENOVSKÝ, P. ZŮDA, J. KLAPETEK, P. HUMLÍČEK, J.
Original Title
Ellipsometry of surface layers on a 1-kg sphere from natural silicon
Type
journal article in Web of Science
Language
English
Original Abstract
We have investigated surface layers on a monocrystalline float-zone, n-type (2400–2990 cm) spherewith the diameter of 93.6004 mm. Ellipsometric spectra in the visible–ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1–6 m grits; the overlayers were examined by mid–infrared ellipsometry, including the range of polar vibrations of the Si-O bonds. AFM measurements on the sphere were used to test the models of its surface.
Keywords
Silicon Surface layers; Ellipsometry; 1-kg mass standard
Authors
KLENOVSKÝ, P.; ZŮDA, J.; KLAPETEK, P.; HUMLÍČEK, J.
Released
1. 11. 2017
ISBN
0169-4332
Periodical
Applied Surface Science
Year of study
421
Number
1
State
Kingdom of the Netherlands
Pages from
542
Pages to
546
Pages count
5
BibTex
@article{BUT134544, author="Petr {Klenovský} and Jaroslav {Zůda} and Petr {Klapetek} and Josef {Humlíček}", title="Ellipsometry of surface layers on a 1-kg sphere from natural silicon", journal="Applied Surface Science", year="2017", volume="421", number="1", pages="542--546", doi="10.1016/j.apsusc.2016.08.135", issn="0169-4332" }