Publication detail

Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

LAZAR, J. KLAPETEK, P. VALTR, M. HRABINA, J. BUCHTA, Z. ČÍP, O. ČÍŽEK, M. OULEHLA, J. ŠERÝ, M.

Original Title

Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

Type

journal article in Web of Science

Language

English

Original Abstract

We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 x 200 x 10) microm. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.

Keywords

nanometrology; nanopositioning interferometry; AFM; nanoscale

Authors

LAZAR, J.; KLAPETEK, P.; VALTR, M.; HRABINA, J.; BUCHTA, Z.; ČÍP, O.; ČÍŽEK, M.; OULEHLA, J.; ŠERÝ, M.

Released

7. 1. 2014

Publisher

MDPI

ISBN

1424-8220

Periodical

SENSORS

Year of study

14

Number

1

State

Swiss Confederation

Pages from

877

Pages to

886

Pages count

10

URL

http://www.mdpi.com/1424-8220/14/1/877

BibTex

@article{BUT138312,
  author="Josef {Lazar} and Petr {Klapetek} and Miroslav {Valtr} and Jan {Hrabina} and Zdeněk {Buchta} and Ondřej {Číp} and Martin {Čížek} and Jindřich {Oulehla} and Mojmír {Šerý}",
  title="Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy
",
  journal="SENSORS",
  year="2014",
  volume="14",
  number="1",
  pages="877--886",
  doi="10.3390/s140100877",
  issn="1424-8220",
  url="http://www.mdpi.com/1424-8220/14/1/877"
}