Přístupnostní navigace
E-application
Search Search Close
Publication detail
SOMER, J.
Original Title
Optical pressure sensors in LTCC technology
Type
conference paper
Language
English
Original Abstract
This paper deals with the design, manufacturing and measurement of optical pressure sensors developed in Low Temperature Co-fired Ceramic technology. Two types of the optical measurement methods were used for the pressure sensing. The first method is based on the distance measurement using Fabry Perot resonator. The second type of pressure transducer is based on the change of the light spectrum reflected from the Fiber Bragg Grating integrated in the sensor. LTCC ceramic structure with membrane was used for the forming of a pressure transducer. Both of the sensor types were designed to measure pressure in range of ± 0,5 bar difference atmospheric pressure.
Keywords
Low Temperature Co-fired Ceramic, pressure sensors, Fabry-Perot resonator, Fiber Bragg Grating
Authors
Released
24. 5. 2017
ISBN
978-80-214-5496-5
Book
Proceedings of the 23rd Conference STUDENT EEICT 2017
Pages from
552
Pages to
556
Pages count
707
BibTex
@inproceedings{BUT138615, author="Jakub {Somer}", title="Optical pressure sensors in LTCC technology", booktitle="Proceedings of the 23rd Conference STUDENT EEICT 2017", year="2017", pages="552--556", isbn="978-80-214-5496-5" }