Publication detail

Impact of the shape of the differentially pumped chamber on critical flow character

HLAVATÁ, P. MAXA, J. BÍLEK, M. VYROUBAL, P.

Original Title

Impact of the shape of the differentially pumped chamber on critical flow character

Type

conference paper

Language

English

Original Abstract

The article deals with the impact of the shape of the differential pumped chamber of the Environmental electron microscope on resultant value of average Normalized density number on the path of the primary electron beam which has directly proportional influence on the dispersion of this beam and thereby influence on sharpness resulting image. Analysis were made using finite volume method in Ansys Fluent system with the respect to critical flow created behind the aperture which separates differential pumped chamber from specimen chamber.

Keywords

Dr. Danilatos, Monte Carlo, ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope

Authors

HLAVATÁ, P.; MAXA, J.; BÍLEK, M.; VYROUBAL, P.

Released

30. 11. 2017

Publisher

Electrochemical Society Inc.

ISBN

9781607688297

Book

ECS Transactions

Edition

81

Edition number

1

ISBN

1938-5862

Periodical

ECS Transactions

Year of study

81

Number

1

State

United States of America

Pages from

317

Pages to

322

Pages count

6

URL

https://iopscience.iop.org/article/10.1149/08101.0317ecst/pdf

BibTex

@inproceedings{BUT140360,
  author="Pavla {Šabacká} and Jiří {Maxa} and Michal {Bílek} and Petr {Vyroubal}",
  title="Impact of the shape of the differentially pumped chamber on critical flow
character",
  booktitle="ECS Transactions",
  year="2017",
  series="81",
  journal="ECS Transactions",
  volume="81",
  number="1",
  pages="317--322",
  publisher="Electrochemical Society Inc.",
  doi="10.1149/08101.0317ecst",
  isbn="9781607688297",
  issn="1938-5862",
  url="https://iopscience.iop.org/article/10.1149/08101.0317ecst/pdf"
}