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HUBÁLEK, J. SCHNEIDER, M. HRDÝ, R. PRÁŠEK, J. SCHMID, U.
Original Title
Project for Energy Storage on a Chip for MEMS
Type
article in a collection out of WoS and Scopus
Language
English
Original Abstract
A new project with a budget of 262 thousands Euro was motivated by the lack of micromachined energy storage solutions that can be integrated with a MEMS harvester on a chip with a specific circuitry. . These key components of the system are highly needed for autonomous microsystems and have to be integrated to enable an energy-autonomous, but efficient operation The targeted energy storage device needs to be charged very slowly from harvesters with output energies in the μWs range. As a consequence, tailored materials and technologies for the realization of thin-film capacitors compatible with CMOS technology are of utmost importance. Target capacitance value about one hundred μF/cm2, low loss factor and low leakage currents are the expected properties of these devices.
Keywords
capacitor; on-chip; dielectric; high-k; atomic layer deposition
Authors
HUBÁLEK, J.; SCHNEIDER, M.; HRDÝ, R.; PRÁŠEK, J.; SCHMID, U.
Released
19. 9. 2017
Publisher
European Passive Components Institute
Location
Lanškroun
Pages count
5
BibTex
@inproceedings{BUT143654, author="Jaromír {Hubálek} and Michael {Schneider} and Radim {Hrdý} and Jan {Prášek} and Ulrich {Schmid}", title="Project for Energy Storage on a Chip for MEMS", year="2017", pages="5", publisher="European Passive Components Institute", address="Lanškroun" }