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LINHART, J. NEDĚLA, V.
Original Title
Difference between SE and BSE contrast in ESEM
Type
conference paper
Language
English
Original Abstract
This paper deals with the study of secondary electrons (SE) and backscattered electrons (BSE) contrast in the environmental scanning electron microscopy (ESEM). The main difference of SE and BSE detection in ESEM is influenced by the used detector system. The gaseous SE detector and the scintillation BSE detector can be used. For the reason to understand differences between SE and BSE imaging, the theoretical background of generation, detection and characters of SE and BSE and mechanism of interactions between electrons and environmental conditions are described. This theory is verified by direct comparative pictures of nonconductive samples at variable pressure.
Key words in English
secondary electrons, backscattered electrons, environmental scanning electron microscopy, observating of nonconductive samples
Authors
LINHART, J.; NEDĚLA, V.
Released
9. 2. 2005
Publisher
Faculty of electrical engineering and information technology, Slovak University of technology
Location
Bratislava
ISBN
80-7043-474-0
Book
Proceedings of the seventh conference for PhD students ELITECH 2005
Pages from
103
Pages to
105
Pages count
3
URL
ÚPT AVČR Brno
BibTex
@inproceedings{BUT14417, author="Jan {Linhart} and Vilém {Neděla}", title="Difference between SE and BSE contrast in ESEM", booktitle="Proceedings of the seventh conference for PhD students ELITECH 2005", year="2005", pages="3", publisher="Faculty of electrical engineering and information technology, Slovak University of technology", address="Bratislava", isbn="80-7043-474-0", url="ÚPT AVČR Brno" }