Publication result detail

Techniques for Characterization of Integrated Nonlinear Capacitors

SUTORÝ, T.

Original Title

Techniques for Characterization of Integrated Nonlinear Capacitors

English Title

Techniques for Characterization of Integrated Nonlinear Capacitors

Type

Paper in proceedings (conference paper)

Original Abstract

The paper deals with techniques for capacitance characterization of integrated nonlinear capacitors on a chip. Several methods are compared, main part is about CBCM method (Charge-Based Capacitance Measurements) and it's application to the nonlinear capacitance characterization. Since its invention the CBCM method has been extensively used for on-chip interconnect linear capacitance measurements. However, it can be also used for nonlinear device characterization. Application of CBCM to CMOS gate-capacitance measurements is presented.

English abstract

The paper deals with techniques for capacitance characterization of integrated nonlinear capacitors on a chip. Several methods are compared, main part is about CBCM method (Charge-Based Capacitance Measurements) and it's application to the nonlinear capacitance characterization. Since its invention the CBCM method has been extensively used for on-chip interconnect linear capacitance measurements. However, it can be also used for nonlinear device characterization. Application of CBCM to CMOS gate-capacitance measurements is presented.

Key words in English

capacitance characterization, integrated, nonlinear, capacitors, CBCM method, CMOS gate-capacitance

Authors

SUTORÝ, T.

Released

28.04.2005

Publisher

Ing. Zdeněk Novotný CSc., Ondráčkova 105, Brno

Location

Brno

ISBN

-80-214-2889-9

Book

Proceedings of the 11th conference Student EEICT 2005 Volume 2

Pages from

322

Pages count

5

BibTex

@inproceedings{BUT14756,
  author="Tomáš {Sutorý}",
  title="Techniques for Characterization of Integrated Nonlinear Capacitors",
  booktitle="Proceedings of the 11th conference Student EEICT 2005 Volume 2",
  year="2005",
  number="první",
  pages="5",
  publisher="Ing. Zdeněk Novotný CSc., Ondráčkova 105, Brno",
  address="Brno",
  isbn="-80-214-2889-9"
}