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HORÁK, M. BUKVIŠOVÁ, K. ŠVARC, V. JASKOWIEC, J. KŘÁPEK, V. ŠIKOLA, T.
Original Title
Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography
Type
journal article in Web of Science
Language
English
Original Abstract
We present a comparative study of plasmonic antennas fabricated by electron beam lithography and direct focused ion beam milling. We have investigated optical and structural properties and chemical composition of gold disc-shaped plasmonic antennas on a silicon nitride membrane fabricated by both methods to identify their advantages and disadvantages. Plasmonic antennas were characterized using transmission electron microscopy including electron energy loss spectroscopy and energy dispersive X-ray spectroscopy, and atomic force microscopy. We have found stronger plasmonic response with better field confinement in the antennas fabricated by electron beam lithography, which is attributed to their better structural quality, homogeneous thickness, and only moderate contamination mostly of organic nature. Plasmonic antennas fabricated by focused ion beam lithography feature weaker plasmonic response, lower structural quality with pronounced thickness fluctuations, and strong contamination, both organic and inorganic, including implanted ions from the focused beam. While both techniques are suitable for the fabrication of plasmonic antennas, electron beam lithography shall be prioritized over focused ion beam lithography due to better quality and performance of its products.
Keywords
Plasmonic antennas; electron beam lithography; focused ion beam lithography; electron energy loss spectroscopy; localized surface plasmon.
Authors
HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T.
Released
25. 6. 2018
Publisher
Springer Nature
ISBN
2045-2322
Periodical
Scientific Reports
Year of study
8
Number
1
State
United Kingdom of Great Britain and Northern Ireland
Pages from
9640
Pages to
9648
Pages count
URL
http://link.springer.com/article/10.1038/s41598-018-28037-1
Full text in the Digital Library
http://hdl.handle.net/11012/83813
BibTex
@article{BUT148493, author="Michal {Horák} and Kristýna {Bukvišová} and Vojtěch {Švarc} and Jiří {Jaskowiec} and Vlastimil {Křápek} and Tomáš {Šikola}", title="Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography", journal="Scientific Reports", year="2018", volume="8", number="1", pages="9640--9648", doi="10.1038/s41598-018-28037-1", issn="2045-2322", url="http://link.springer.com/article/10.1038/s41598-018-28037-1" }