Publication detail

About the information depth of backscattered electron imaging

Š. MIKMEKOVÁ L. FRANK

Original Title

About the information depth of backscattered electron imaging

Type

journal article in Web of Science

Language

English

Original Abstract

he information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo‐based software. Recommendations are given for routine estimations of BSE information depths.

Keywords

Backscattered electrons, information depth, penetration of electrons

Authors

Š. MIKMEKOVÁ L. FRANK

Released

1. 3. 2017

Publisher

Royal Microscopical Society

ISBN

1365-2818

Periodical

Journal of Microscopy

Year of study

266

Number

3 2017

State

United Kingdom of Great Britain and Northern Ireland

Pages from

335

Pages to

342

Pages count

7

URL

https://onlinelibrary.wiley.com/doi/abs/10.1111/jmi.12542

BibTex

@article{BUT149390,
  author="Jakub {Piňos}",
  title="About the information depth of backscattered electron imaging",
  journal="Journal of Microscopy",
  year="2017",
  volume="266",
  number="3 2017",
  pages="335--342",
  doi="10.1111/jmi.12542",
  issn="1365-2818",
  url="https://onlinelibrary.wiley.com/doi/abs/10.1111/jmi.12542"
}