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MAXA, J. HLAVATÁ, P. VYROUBAL, P.
Original Title
Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.
Type
journal article - other
Language
English
Original Abstract
The article is focused on the medium dynamics simulation in the environmental scanning electron microscope. Specifically, it researches (examines) the conical aperture location effect in the differential pumped chamber and the width of the pumping channel in this chamber. The problem was solved in the Ansys Fluent system using mechanism of continuum and finite volume method. The problem is solved according to the Taylor – Maccoll theory about the impact of the shock wave.
Keywords
Environmental scanning electron microscope (ESEM), ANSYS Fluent, finite volume method, Differentially pumped chamber, Taylor – Maccoll theory.
Authors
MAXA, J.; HLAVATÁ, P.; VYROUBAL, P.
Released
26. 10. 2018
Publisher
University of Defence
Location
Brno
ISBN
1802-2308
Periodical
Advances in Military Technology
Number
1
State
Czech Republic
Pages from
50
Pages to
61
Pages count
12
BibTex
@article{BUT150566, author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}", title="Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber.", journal="Advances in Military Technology", year="2018", number="1", pages="50--61", issn="1802-2308" }