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MAXA, J. HLAVATÁ, P. VYROUBAL, P.
Original Title
Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre
Type
conference paper
Language
English
Original Abstract
This article comes out from the series of articles devoted to the issue of pumping in the differentially pumped chamber. This article is based on a study of Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistic method. To solve the problem, we use the mechanics of continuum with experimental verification. The article deals with a construction of the conic tip of the static probe.
Keywords
Environmental scanning electron microscope (ESEM), ANSYS Fluent, finite volume method, Differentially pumped chamber, Taylor – Maccoll theory.
Authors
MAXA, J.; HLAVATÁ, P.; VYROUBAL, P.
Released
20. 10. 2018
ISBN
978-80-214-5109-4
Book
ECS Transactions
1938-5862
Periodical
Number
1
State
United States of America
Pages from
377
Pages to
387
Pages count
11
URL
https://iopscience.iop.org/article/10.1149/08701.0377ecst
BibTex
@inproceedings{BUT150573, author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}", title="Using the ideal and real gas model for the mathematical - physics analysis of the experimental chambre", booktitle="ECS Transactions", year="2018", journal="ECS Transactions", number="1", pages="377--387", doi="10.1149/08701.0377ecst", isbn="978-80-214-5109-4", issn="1938-5862", url="https://iopscience.iop.org/article/10.1149/08701.0377ecst" }