Publication detail

MEMS Microhotplates for Chemical Sensors

PRÁŠEK, J. VANČÍK, S. SVATOŠ, V. KLEMPA, J. GABLECH, I. PYTLÍČEK, Z. LEVEK, V.

Original Title

MEMS Microhotplates for Chemical Sensors

Type

conference paper

Language

English

Original Abstract

In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.

Keywords

microhotplate; MEMS; micromachining; gas sensor

Authors

PRÁŠEK, J.; VANČÍK, S.; SVATOŠ, V.; KLEMPA, J.; GABLECH, I.; PYTLÍČEK, Z.; LEVEK, V.

Released

21. 8. 2018

Publisher

IEEE Computer Society

Location

Serbia

ISBN

9781538657317

Book

41st International Spring Seminar on Electronics Technology ISSE2018

ISBN

2161-2528

Periodical

Electronics Technology (ISSE)

Year of study

2018

State

United States of America

Pages from

1

Pages to

5

Pages count

5

BibTex

@inproceedings{BUT150735,
  author="Jan {Prášek} and Silvester {Vančík} and Vojtěch {Svatoš} and Jaroslav {Klempa} and Imrich {Gablech} and Zdeněk {Pytlíček} and Vladimír {Levek}",
  title="MEMS Microhotplates for Chemical Sensors",
  booktitle="41st International Spring Seminar on Electronics Technology ISSE2018",
  year="2018",
  journal="Electronics Technology (ISSE)",
  volume="2018",
  pages="1--5",
  publisher="IEEE Computer Society",
  address="Serbia",
  doi="10.1109/ISSE.2018.8443768",
  isbn="9781538657317",
  issn="2161-2528"
}