Publication detail

Integration of one-dimensional gas sensitive nanostructures grown via chemical vapour deposition into microdevices

VALLEJOS VARGAS, S. TOMIC, M. FIGUERAS, E. CHMELA, O. HUBÁLEK, J. DOMENECH, G. PRADES, D. ROMANO-RODRIGUEZ, A. BARTH, S. CANÉ, C.

Original Title

Integration of one-dimensional gas sensitive nanostructures grown via chemical vapour deposition into microdevices

Type

conference proceedings

Language

English

Original Abstract

Nanostructures (NS), e.g., based on metal oxides, are attractive in gas sensors because they proved to enhance their functionality, providing better sensitivity, stability, and selectivity. Further enhancement of the functionality of nanostructures is also known to be achieved by electronic and/or chemical sensitization via the surface modification with second-phase materials (e.g., catalytic nanoparticles with sizes less than 10 nm). The formation of NSs is traditionally achieved via liquid- or vapour-phase routes, with the vapour-phase routes (e.g., CVD) having shown advantages that include greater purity, the ability to generate NSs in continuous rather than batch mode and higher throughputs. This is crucial for developing a low cost manufacturing method of gas sensing devices that may be adequate for high volume Smart System Solutions. Thus, in this work, the use of CVD and aerosol assisted (AA) CVD to synthesize non-modified and modified NSs is proposed.

Keywords

Chemical detection, Chemical modification, Gas detectors, Gas sensing electrodes, Grid computing, Integration, Nanostructures, Surface treatment

Authors

VALLEJOS VARGAS, S.; TOMIC, M.; FIGUERAS, E.; CHMELA, O.; HUBÁLEK, J.; DOMENECH, G.; PRADES, D.; ROMANO-RODRIGUEZ, A.; BARTH, S.; CANÉ, C.

Released

11. 4. 2018

Publisher

Mesago Messe Frankfurt GmbH

Location

Stuttgart, Germany

ISBN

978-3-95735-082-4

Book

Proceedings Smart Systems Integration 2018 International Conference & Exhibition on integration issues of miniaturized systems - MEMS, NEMS, ICs and electronic components

Pages from

250

Pages to

257

Pages count

8

BibTex

@proceedings{BUT151382,
  editor="VALLEJOS VARGAS, S. and TOMIC, M. and FIGUERAS, E. and CHMELA, O. and HUBÁLEK, J. and DOMENECH, G. and PRADES, D. and ROMANO-RODRIGUEZ, A. and BARTH, S. and CANÉ, C.",
  title="Integration of one-dimensional gas sensitive nanostructures grown via chemical vapour deposition into microdevices",
  year="2018",
  pages="250--257",
  publisher="Mesago Messe Frankfurt GmbH",
  address="Stuttgart, Germany",
  isbn="978-3-95735-082-4"
}