Publication detail

Optical pressure sensors for harsh environment

SOMER, J. URBAN, F. SZENDIUCH, I. URBAN, F.

Original Title

Optical pressure sensors for harsh environment

Type

conference paper

Language

English

Original Abstract

This paper deals with the design, manufacturing, and evaluation of a new optical pressure sensor produced by using Low Temperature Co-fired Ceramic technology. This optical sensor is designed for the applications with harsh operating conditions. The sensor has to withstand temperatures up to 300 °C and work in chemically aggressive environment. The paper gives a brief overview of the benefits and problems related to the optical measurement methods suitable for pressure sensor interrogation. Optical spectrum change based measurement method was chosen for the best sensor performance. Pressure transducer presented in this paper is based on the interrogation of the light spectra reflected from the Fabry-Pérot optical cavity. The sensors were designed for various pressure ranges, samples were manufactured, measured and tested. A selected optical method for enhancing the temperature compensation and measurement accuracy is discussed.

Keywords

Pressure sensor; Low Temperature Co-Fired Ceramics; Optical fiber; Fiber Bragg Grating; Optical resonator

Authors

SOMER, J.; URBAN, F.; SZENDIUCH, I.; URBAN, F.

Released

26. 4. 2018

ISBN

978-0-9568086-4-6

Book

Microelectronics and Packaging Conference (EMPC) & Exhibition, 2017 21st European

Pages from

1

Pages to

5

Pages count

5

URL

https://ieeexplore.ieee.org/document/8346868

BibTex

@inproceedings{BUT151966,
  author="Jakub {Somer} and František {Urban} and Ivan {Szendiuch} and František {Urban}",
  title="Optical pressure sensors for harsh environment",
  booktitle="Microelectronics and Packaging Conference (EMPC) & Exhibition, 2017 21st European",
  year="2018",
  pages="1--5",
  doi="10.23919/EMPC.2017.8346868",
  isbn="978-0-9568086-4-6",
  url="https://ieeexplore.ieee.org/document/8346868"
}