Publication detail

CALIBRATION METHOD BASED ON NUMERICAL MODEL FOR THE MEMS 3D ACCELEROMETER

BENEŠ, P. KLUSÁČEK, S. MÁLEK, P. JÍLEK, T.

Original Title

CALIBRATION METHOD BASED ON NUMERICAL MODEL FOR THE MEMS 3D ACCELEROMETER

Type

conference paper

Language

English

Original Abstract

This paper compare calibration methods for three axis MEMS accelerometers. Scalar calibration method is based on mathematical model of the sensors, which use six or twelve calibration parameters – three gain factors, three biases and six misalignment sensitivities. The basic principle of the calibration method is based on the fact, that the sum of the measured acceleration vectors x, y, z is equal to the earth gravity vector when accelerometer is stationary. The method does not require any additional expensive equipment like vibration shaker or accurate positioning system. The calibration method was experimentally verified on low-noise capacitive MEMS accelerometers Analog Devices ADXL35x and results were compared with calibration on commercial calibra-tion system SPEKTRA CS18P HF. It has been found that the scalar calibration method is very sensitive to the chosen parameter estimation method and can only be recom-mended if there are no requirements for low measurement uncertainty.

Keywords

calibration, accelerometer, MEMS 3D sensors, scalar calibration

Authors

BENEŠ, P.; KLUSÁČEK, S.; MÁLEK, P.; JÍLEK, T.

Released

12. 7. 2018

Location

Hiroshima

ISBN

978-83-7880-552-6

Book

Proceedings of the 25th International Congress on Sound and Vibration

Pages from

150

Pages to

155

Pages count

6

URL

http://toc.proceedings.com/40638webtoc.pdf

BibTex

@inproceedings{BUT153349,
  author="Petr {Beneš} and Stanislav {Klusáček} and Petr {Málek} and Tomáš {Jílek}",
  title="CALIBRATION METHOD BASED ON NUMERICAL MODEL FOR THE MEMS 3D ACCELEROMETER",
  booktitle="Proceedings of the 25th International Congress on Sound and Vibration",
  year="2018",
  pages="150--155",
  address="Hiroshima",
  isbn="978-83-7880-552-6",
  url="http://toc.proceedings.com/40638webtoc.pdf"
}