Publication detail

Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods

VALLEJOS VARGAS, S. GRÁCIA, I. LEDNICKÝ, T. VOJKŮVKA, L. FIGUERAS, E. HUBÁLEK, J. CANÉ, C.

Original Title

Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods

Type

journal article in Web of Science

Language

English

Original Abstract

Chemoresistive gas microsensors with highly hydrogen sensitive zinc oxide rods dominated by exposed {100} surfaces are fabricated. The hexagonal rod structures are integrated into micromachined transducing platforms without the need for substrate pre-treatment, via a vapor-solid mechanism enabled using an aerosol-assisted chemical vapor deposition method. The improved functionality of these systems towards hydrogen is attributed to the formation of an accumulation layer at the zinc oxide rods after hydrogen exposure, which includes a mechanism not only dominated by the oxygen vacancies, but also by the formation of intermediate energy levels for the transfer of charge from hydrogen to the zinc oxide conduction band.

Keywords

Zinc oxide; Gas sensor; Hydrogen

Authors

VALLEJOS VARGAS, S.; GRÁCIA, I.; LEDNICKÝ, T.; VOJKŮVKA, L.; FIGUERAS, E.; HUBÁLEK, J.; CANÉ, C.

Released

1. 9. 2018

Publisher

ELSEVIER SCIENCE SA,

Location

LAUSANNE, SWITZERLAND

ISBN

0925-4005

Periodical

Sensors and Actuators B: Chemical

Year of study

268

Number

1

State

Swiss Confederation

Pages from

15

Pages to

21

Pages count

7

URL

https://www.sciencedirect.com/science/article/pii/S0925400518307299?via%3Dihub

BibTex

@article{BUT155578,
  author="VALLEJOS VARGAS, S. and GRÁCIA, I. and LEDNICKÝ, T. and VOJKŮVKA, L. and FIGUERAS, E. and HUBÁLEK, J. and CANÉ, C.",
  title="Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods",
  journal="Sensors and Actuators B: Chemical",
  year="2018",
  volume="268",
  number="1",
  pages="15--21",
  doi="10.1016/j.snb.2018.04.033",
  issn="0925-4005",
  url="https://www.sciencedirect.com/science/article/pii/S0925400518307299?via%3Dihub"
}