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Publication detail
Hlavata, P. Maxa, J.
Original Title
FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING
Type
journal article - other
Language
English
Original Abstract
The paper deals with the effect of the critical flow, which is reached during pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The study compares the state of the flow in the area of pumped chamber at pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. The problem was solved using the finite volume method by the Ansys Fluent system.
Keywords
Differentially pumped chamber; ESEM; Ansys Fluent; The finite volume method; SolidWorks
Authors
Hlavata, P.; Maxa, J.
Released
7. 1. 2019
Publisher
Universitas Publishing House
Location
Petrosani
ISBN
1454-9166
Periodical
Annals of Petrosani University - Mechanical Engineering -
Year of study
20
Number
1
State
Romania
Pages from
33
Pages to
40
Pages count
8
URL
https://www.upet.ro/annals/mechanical/pdf/2018/06_Hlavata.pdf
BibTex
@article{BUT157328, author="Pavla {Šabacká} and Jiří {Maxa}", title="FLOW ANALYSIS OF THE PRESSURE DISTRIBUTION IN THE EXPERIMENTAL CHAMBER OF THE DIFFERENTIAL PUMPING", journal="Annals of Petrosani University - Mechanical Engineering - ", year="2019", volume="20", number="1", pages="33--40", issn="1454-9166", url="https://www.upet.ro/annals/mechanical/pdf/2018/06_Hlavata.pdf" }