Publication detail

Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization

SKALSKÝ, M. FIALKA, J. HAVRÁNEK, Z.

Original Title

Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization

Type

conference paper

Language

English

Original Abstract

An accurate characterization of piezoelectric films is essential for their usage in various types of MEMS sensors and actuators. This paper presents a novel scanning double-beam laser interferometer (DBLI) to measure the thickness piezoelectric coefficient with a high accuracy. Compared to previous DBLI solutions, we employ a closed-loop phase shift compensation via an electro-optical modulator to stabilize the random phase drift as well as to compensate the harmonic sample-induced phase shift. As a consequence, the setup robustness is enhanced and the measured displacement is no more sensitive to sample reflectivity or source and detector signal gains, which allows to use the DBLI as scanning.

Keywords

laser scanning interferometry, double-beam, phase compensation

Authors

SKALSKÝ, M.; FIALKA, J.; HAVRÁNEK, Z.

Released

20. 5. 2019

Publisher

IEEE

Location

Piscataway; USA

ISBN

978-1-5386-3460-8

Book

2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2019) Proceedings

Edition

CFP19IMT-ART

Pages from

466

Pages to

471

Pages count

6

URL

https://ieeexplore.ieee.org/abstract/document/8826963

BibTex

@inproceedings{BUT158395,
  author="Michal {Skalský} and Jiří {Fialka} and Zdeněk {Havránek}",
  title="Scanning Double-Beam Laser Interferometer with Loop-Back Compensation and Phase Stabilization",
  booktitle="2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2019) Proceedings",
  year="2019",
  series="CFP19IMT-ART",
  pages="466--471",
  publisher="IEEE",
  address="Piscataway; USA",
  doi="10.1109/I2MTC.2019.8826963",
  isbn="978-1-5386-3460-8",
  url="https://ieeexplore.ieee.org/abstract/document/8826963"
}