Přístupnostní navigace
E-application
Search Search Close
Publication detail
KNÁPEK, A. ŠIKULA, J. BARTLOVÁ, M.
Original Title
Fluctuations of focused electron beam in a conventional SEM
Type
journal article in Web of Science
Language
English
Original Abstract
Noise diagnostics was performed on a tungsten hairpin cathode that was used in conventional scanning electron microscope (SEM) which operates in a high vacuum. The focused beam was firstly measured and its power spectrum obtained in order to characterize its slope in the lower frequencies which are connected with the events occurring on the cathode surface during the emission of electrons. Further experiments involved additional noise measurements which evaluated electron beam with altering beam energy, in particular at 5 kV, 10 kV and 20 kV up to 30 kV; with and without electron beam scanning involved and with different levels of cathode heating. Obtained results were evaluated in relation to a 1/f type noise component, generation-recombination process on the cathode surface, on the shot noise and on the velocity fluctuations caused by the ion oscillations. Achieved results were discussed.
Keywords
Thermal electron emission, electronic noise, low-energy electron beam
Authors
KNÁPEK, A.; ŠIKULA, J.; BARTLOVÁ, M.
Released
20. 5. 2019
Publisher
ELSEVIER SCIENCE BV
Location
AMSTERDAM, NETHERLANDS
ISBN
0304-3991
Periodical
Ultramicroscopy
Year of study
204
Number
1
State
Kingdom of the Netherlands
Pages from
49
Pages to
54
Pages count
6
URL
https://www.sciencedirect.com/science/article/abs/pii/S0304399119300683
BibTex
@article{BUT159341, author="Alexandr {Knápek} and Josef {Šikula} and Milada {Bartlová}", title="Fluctuations of focused electron beam in a conventional SEM", journal="Ultramicroscopy", year="2019", volume="204", number="1", pages="49--54", doi="10.1016/j.ultramic.2019.05.008", issn="0304-3991", url="https://www.sciencedirect.com/science/article/abs/pii/S0304399119300683" }